المؤلفون: Takamitsu Nagai, Takayuki Uchiyama, Susumu Iida

المصدر: Metrology, Inspection, and Process Control for Microlithography XXXIII.

مصطلحات موضوعية: Microscope, Materials science, business.industry, Substrate (electronics), law.invention, Wafer fabrication, Etching (microfabrication), law, Distortion, Charge control, Optoelectronics, Wafer, business, Electron-beam lithography

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::d1d46b175f6bf736b5049a248ba80448
https://doi.org/10.1117/12.2514897

المؤلفون: Takamitsu Nagai, Susumu Iida, Takayuki Uchiyama

المصدر: Journal of Micro/Nanolithography, MEMS, and MOEMS. 18:1

مصطلحات موضوعية: Materials science, business.industry, Scanning electron microscope, Mechanical Engineering, Resolution (electron density), 02 engineering and technology, Surface finish, 021001 nanoscience & nanotechnology, Condensed Matter Physics, 01 natural sciences, Atomic and Molecular Physics, and Optics, Electronic, Optical and Magnetic Materials, Metrology, 010309 optics, 0103 physical sciences, Charge control, Optoelectronics, Node (circuits), Wafer, Electrical and Electronic Engineering, 0210 nano-technology, business, Lithography

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::6057ae9fd0b2b91133718c4c1e8614c9
https://doi.org/10.1117/1.jmm.18.3.033503

المؤلفون: Takayuki Uchiyama, Susumu Iida, Takamitsu Nagai

المصدر: Journal of Micro/Nanolithography, MEMS, and MOEMS. 18:1

مصطلحات موضوعية: Materials science, Fabrication, business.industry, Mechanical Engineering, 02 engineering and technology, 021001 nanoscience & nanotechnology, Condensed Matter Physics, 01 natural sciences, Acceleration voltage, Atomic and Molecular Physics, and Optics, Electronic, Optical and Magnetic Materials, 010309 optics, Wafer fabrication, Etching (microfabrication), 0103 physical sciences, Optoelectronics, Wafer, Node (circuits), Electrical and Electronic Engineering, 0210 nano-technology, business, Lithography, Electron-beam lithography

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::e7375b2bf4466e76ab65d92a69e6b1ef
https://doi.org/10.1117/1.jmm.18.2.023505

المؤلفون: Susumu Iida, Takamitsu Nagai, Takayuki Uchiyama

المصدر: Proceedings of SPIE; 1/22/2019, Vol. 10959, p1-13, 13p

المؤلفون: Susumu Iida, Takamitsu Nagai, Takayuki Uchiyama

المصدر: Journal of Micro/Nanolithography, MEMS & MOEMS; Jul-Sep2019, Vol. 18 Issue 3, p1-10, 10p

مصطلحات موضوعية: SCANNING electron microscopes, SCANNING electron microscopy

المؤلفون: Hiroyuki Hayashi, Masayoshi Yamasaki, Takamitsu Nagai, Yuji Fukunaga, Yuichiro Yamazaki

المصدر: SPIE Proceedings.

مصطلحات موضوعية: Materials science, law, Acoustics, Charge control, Electronic engineering, Wafer, Diffusion current, Integrated circuit, Inspection time, Failure mode and effects analysis, Electrical contacts, law.invention, Voltage

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::b3906c776a6cdc059a385c6c6a96bf9f
https://doi.org/10.1117/12.599313

المؤلفون: Takeshi Kakubari, Takamitsu Nagai, Akio Yamada, Masaki Kanoh

المصدر: TRANSACTIONS OF THE JAPAN SOCIETY OF MECHANICAL ENGINEERS Series C. 55:2986-2991

مصطلحات موضوعية: Surface (mathematics), Energy loss, Materials science, Mechanical Engineering, Stiffness, Mechanics, Industrial and Manufacturing Engineering, Loop (topology), Classical mechanics, Electrical resistance and conductance, Mechanics of Materials, Coulomb, medicine, medicine.symptom, Coefficient of friction

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::155951ce0100ff1a307871e672b3e9ed
https://doi.org/10.1299/kikaic.55.2986