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1
المؤلفون: Meng Yang, Shuichi Ogawa, Hiroyuki Hayashi, Yuji Takakuwa, Takanori Eto, Taiichi Otsuji, Susumu Takabayashi
المصدر: Diamond and Related Materials. 53:11-17
مصطلحات موضوعية: Argon, Materials science, Diamond-like carbon, Dopant, Mechanical Engineering, Doping, Analytical chemistry, chemistry.chemical_element, General Chemistry, Dielectric, Oxygen, Electronic, Optical and Magnetic Materials, chemistry, Materials Chemistry, Electrical and Electronic Engineering, Carbon, Layer (electronics)
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2
المؤلفون: Tetsuya Suemitsu, Jun-ichi Kani, Yuhei Yabe, Hiroki Ago, Adrian Dobroiu, Naoto Yoshimoto, Jun Terada, Taiichi Otsuji, Kenji Kawahara, Takanori Eto, Hiroki Sugiyama, Youichi Fukada, Kenta Sugawara, Victor Ryzhii, Katsumi Iwatsuki, Kazuki Kojima, Takayuki Watanabe, Y. Kurita, Tetsuya Kawasaki
المصدر: Solid-State Electronics. 103:216-221
مصطلحات موضوعية: Materials science, Optical fiber, business.industry, Graphene, Terahertz radiation, Condensed Matter Physics, Signal, Electronic, Optical and Magnetic Materials, law.invention, Photomixing, Intermediate frequency, Modulation, law, Materials Chemistry, Optoelectronics, Electrical and Electronic Engineering, Photonics, business
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3
المؤلفون: Ken-ichi Kurobe, Kentaro Shibahara, Takanori Eto
المصدر: IEEE Transactions on Electron Devices. 53(5):1059-1064
مصطلحات موضوعية: Materials science, excimer laser, Excimer laser, Dopant, medicine.medical_treatment, Diffusion, CMOS, Analytical chemistry, Dopant Activation, laser annealing (LA), Electronic, Optical and Magnetic Materials, Amorphous solid, medicine, krypton flouride (KrF), shallow junction, Electrical and Electronic Engineering, p–n junction, Layer (electronics), Sheet resistance
وصف الملف: application/pdf
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::e436b082fc2ec2d20d9a9a8f4df2e8a0
http://ir.lib.hiroshima-u.ac.jp/00017077 -
4Merits and demerits of light absorbers for ultra-shallow junction formation by green laser annealing
المؤلفون: Akira Matsuno, Ken-ichi Kurobe, Eisuke Takii, Takanori Eto, Kentaro Shibahara
المصدر: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms. 237:136-141
مصطلحات موضوعية: Nuclear and High Energy Physics, Materials science, Dopant, business.industry, Annealing (metallurgy), Oxide, chemistry.chemical_element, Thermal diffusivity, Laser, Amorphous solid, law.invention, chemistry.chemical_compound, Optics, chemistry, law, Optoelectronics, Tin, business, Penetration depth, Instrumentation
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5
المؤلفون: Katsumi Iwatsuki, Kazuki Kojima, Jun-ichi Kani, Susumu Takabayashi, Tetsuya Kawasaki, Yuhei Yabe, Jun Terada, Adrian Dobroiu, Tetsuya Suemitsu, Hiroki Sugiyama, Youichi Fukada, Takayuki Watanabe, Y. Kurita, Taiichi Otsuji, Naoto Yoshimoto, Victor Ryzhii, Takanori Eto
المصدر: ESSDERC
مصطلحات موضوعية: Optical fiber, Materials science, business.industry, Terahertz radiation, Frequency multiplier, Signal, law.invention, Intermediate frequency, Modulation, law, Optoelectronics, Photonics, business, Frequency modulation
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::c08a6c21b3f6cb1fb60c324c91ea2780
https://doi.org/10.1109/essderc.2013.6818882 -
6
المؤلفون: Eisuke Takii, Takanori Eto, Akira Matsuno, Kentaro Shibahara
المصدر: 2005 13th International Conference on Advanced Thermal Processing of Semiconductors.
مصطلحات موضوعية: Materials science, Silicon, Dopant, Annealing (metallurgy), business.industry, chemistry.chemical_element, Dopant Activation, Thermal diffusivity, Thermal conductivity, Optics, chemistry, business, Tin, Penetration depth
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::2fbba50fa7015bfb87ed0bda5fcb4ba1
https://doi.org/10.1109/rtp.2005.1613689 -
7
المؤلفون: Kei Kobayashi, Hideo Sunami, Takanori Eto, Kentaro Shibahara, Kiyoshi Okuyama
المصدر: Extended Abstracts of the 2004 International Conference on Solid State Devices and Materials.
مصطلحات موضوعية: Vertical channel, Materials science, business.industry, Impurity, law, Transistor, Optoelectronics, Nanotechnology, business, Doping profile, law.invention
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::13818f70567ce0f198847f963d1018ed
https://doi.org/10.7567/ssdm.2004.b-6-3 -
8
المؤلفون: Kentaro Shibahara, Takanori Eto
المصدر: Extended Abstracts of the 2004 International Conference on Solid State Devices and Materials.
مصطلحات موضوعية: Materials science, chemistry, chemistry.chemical_element, Profiling (information science), Nanotechnology, Arsenic
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::1c35c58914559043236c9648e83a0f50
https://doi.org/10.7567/ssdm.2004.p5-11 -
9
المؤلفون: Kentaro Shibahara, Takanori Eto, Eisuke Takii, Ken-ichi Kurobe
المصدر: Japanese Journal of Applied Physics. 44:L756
مصطلحات موضوعية: Materials science, Dopant, Green laser, Annealing (metallurgy), business.industry, digestive, oral, and skin physiology, General Engineering, General Physics and Astronomy, Reflectivity, Laser annealing, Optics, Shallow junction, business, Sheet resistance, Pulse-width modulation
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10
المؤلفون: Kentaro Shibahara, Takanori Eto
المصدر: Japanese Journal of Applied Physics. 44:2433
مصطلحات موضوعية: Secondary ion mass spectrometry, Static secondary-ion mass spectrometry, Ion implantation, Low energy, Chemistry, General Engineering, Analytical chemistry, General Physics and Astronomy, Junction formation, Mixing effect, Surface layer, Ion gun