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1
المؤلفون: Hakaru Mizoguchi, Hiroaki Tomuro, Yuichi Nishimura, Hirokazu Hosoda, Hiroaki Nakarai, Tamotsu Abe, Hiroshi Tanaka, Yukio Watanabe, Yutaka Shiraishi, Tatsuya Yanagiga, Georg Soumagne, Fumio Iwamoto, Shinji Nagai, Yoshifumi Ueno, Takashi Suganuma, Gouta Niimi, Takayuki Yabu, Tsuyoshi Yamada, Takashi Saitou
المصدر: International Conference on Extreme Ultraviolet Lithography 2021.
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::860276926d6d0770d696700e646f8b85
https://doi.org/10.1117/12.2600714 -
2
المؤلفون: Hiroaki Nakarai, Yutaka Shiraishi, Yukio Watanabe, Shinji Nagai, Kenichi Miyao, Hakaru Mizoguchi, Yoshifumi Ueno, Georg Soumagne, Hideyuki Hayashi, Takayuki Yabu, Tatsuya Yanagida, Takahiro Tatsumi, Tamotsu Abe
المصدر: Extreme Ultraviolet Lithography 2020.
مصطلحات موضوعية: Co2 laser, Materials science, Light source, Optics, business.industry, Extreme ultraviolet lithography, Dual wavelength laser, business, Reflectivity, Power (physics), Magnetic field
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::522f4ac81025673766746c7f9fe1413f
https://doi.org/10.1117/12.2572689 -
3
المؤلفون: Tsuyoshi Yamada, Hiroaki Nakarai, Hirokazu Hosoda, Yukio Watanabe, Takashi Saitou, Nishimura Yuichi, Takashi Suganuma, Yutaka Shiraishi, Hakaru Mizoguchi, Yoshifumi Ueno, Georg Soumagne, Tamotsu Abe, Tatsuya Yanagiga, Gouta Niimi, Fumio Iwamoto, Shinji Nagai, Hiroaki Tomuro, Takayuki Yabu, Hiroshi Tanaka
المصدر: Extreme Ultraviolet Lithography 2020.
مصطلحات موضوعية: Physics, Semiconductor, Optics, Co2 laser, business.industry, Extreme ultraviolet lithography, Amplifier, Extreme ultraviolet, Energy conversion efficiency, business, Lithography, Power (physics)
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::4c6793f59fb32351be1dc6550ee73dab
https://doi.org/10.1117/12.2574707 -
4
المؤلفون: Yuta Takashima, Yoshifumi Ueno, Takayuki Yabu, Tsukasa Hori, Georg Soumagne, Shinji Nagai, Tatsuya Yanagida, Yutaka Shiraishi, Kenichi Miyao, Hideyuki Hayashi, Yukio Watanabe, Tamotsu Abe, Hiroaki Nakarai, Takashi Saito, Hakaru Mizoguchi
المصدر: International Conference on Extreme Ultraviolet Lithography 2019.
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::102c03c52bafc7e25d800d75bd14a417
https://doi.org/10.1117/12.2536397 -
5
المؤلفون: Tatsuya Yanagida, Saito Takashi, Yutaka Shiraishi, Katsuhiko Wakana, Hakaru Mizoguchi, Georg Soumagne, Yasufumi Kawasuji, Yoshifumi Ueno, Shinji Nagai, Hiroaki Nakarai, Tamotsu Abe, Nishimura Yuichi, Takayuki Yabu, Tsukasa Hori
المصدر: International Conference on Extreme Ultraviolet Lithography 2018.
مصطلحات موضوعية: Materials science, business.industry, Extreme ultraviolet lithography, Pulse duration, Plasma, Laser, law.invention, Wavelength, Optics, Semiconductor, law, Extreme ultraviolet, business, Lithography
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::2366627c735b8e03d93187f9b90d19f8
https://doi.org/10.1117/12.2500356 -
6مؤتمر
المؤلفون: Yuichi Nishimura, Tsukasa Hori, Takayuki Yabu, Katsuhiko Wakana, Yoshifumi Ueno, Georg Soumagne, Shinji Nagai, Tatsuya Yanagida, Yasufumi Kawasuji, Yutaka Shiraishi, Tamotsu Abe, Hiroaki Nakarai, Takashi Saito, Hakaru Mizoguchi
المصدر: Proceedings of SPIE; 8/25/2018, Vol. 10809, p108091M-1-108091M-11, 11p
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7
المؤلفون: Takayuki Yabu, Tatsuo Okada, Katsunori Muraoka, Kiiehiro Uchino, Hakaru Mizoguchi, Naoki Kataoka, Eiji Sunaka, Tatsuo Enami, Mitsuo Maeda
المصدر: IEEJ Transactions on Fundamentals and Materials. 119:821-827
مصطلحات موضوعية: Materials science, Excimer laser, medicine.medical_treatment, medicine, Photoionization, Electrical and Electronic Engineering, Atomic physics
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::5ccb2bf04c02ebc4e6a50d108c7fdeff
https://doi.org/10.1541/ieejfms1990.119.6_821 -
8مؤتمر
المؤلفون: Takayuki Yabu, Yasufumi Kawasuji, Tsukasa Hori, Takeshi Okamoto, Hiroshi Tanaka, Kenichi Miyao, Takuya Ishii, Yukio Watanabe, Tatsuya Yanagida, Yutaka Shiraishi, Tamotsu Abe, Takeshi Kodama, Hiroaki Nakarai, Taku Yamazaki, Noritoshi Itou, Takashi Saito, Hakaru Mizoguchi
المصدر: Proceedings of SPIE; 8/14/2017, Vol. 10450, p1-12, 12p
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9
المؤلفون: Hakaru Mizoguchi, Tsukasa Hori, Hitoshi Nagano, Hiroaki Nakarai, Shinji Nagai, Kouji Kakizaki, Akihiko Kurosu, Junichi Fujimoto, Takashi Suganuma, Takayuki Yabu, Krzysztof Nowak, Takeshi Ohta, Takanobu Ishihara, Georg Soumagne, Tatsuya Yanagida, Akira Sumitani, Hidenobu Kameda, Tamotsu Abe, Masato Moriya, Yukio Watanabe
المصدر: SPIE Proceedings.
مصطلحات موضوعية: Physics, Continuous operation, business.industry, Extreme ultraviolet lithography, Energy conversion efficiency, Plasma, Laser, law.invention, Optics, law, Duty cycle, Extreme ultraviolet, Optoelectronics, business, Lithography
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::374e4314cd18f1d2e39a1a4bea0919aa
https://doi.org/10.1117/12.880382 -
10
المؤلفون: Junichi Fujimoto, Takayuki Yabu, Tatsuya Yanagida, Akira Sumitani, Yasunori Wada, Tsukasa Hori, Kouji Kakizaki, Georg Soumagne, Hakaru Mizoguchi, Akira Endo, Shinji Nagai, Hitoshi Nagano
المصدر: SPIE Proceedings.
مصطلحات موضوعية: Materials science, business.industry, Extreme ultraviolet lithography, Energy conversion efficiency, Plasma, Laser, Pulsed laser deposition, law.invention, Optics, law, Extreme ultraviolet, Optoelectronics, business, Lithography, Next-generation lithography
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::97b95c89ee219442efc5ef205a116542
https://doi.org/10.1117/12.879189