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1
المؤلفون: Hiroaki Tomuro, Yoshifumi Ueno, Shinji Nagai, Fumio Iwamoto, Kenichi Miyao, Hideyuki Hayashi, Takuya Ishii, Tamotsu Abe, Hiroaki Nakarai, Takashi Saitou, Hakaru Mizoguchi
المصدر: Optical and EUV Nanolithography XXXVI.
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::5ee1117e78b12b342dd16c9e11657e52
https://doi.org/10.1117/12.2657640 -
2
المؤلفون: Yuichi Nishimura, Yoshifumi Ueno, Shinji Nagai, Fumio Iwamoto, Kenichi Miyao, Hideyuki Hayashi, Yukio Watanabe, Tamotsu Abe, Hiroaki Nakarai, Hakaru Mizoguchi
المصدر: Optical and EUV Nanolithography XXXV.
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::2d509137e68eba445ec4be65d72ca8f9
https://doi.org/10.1117/12.2612778 -
3
المؤلفون: Hiroaki Nakarai, Tatsuya Yanagida, Kenichi Miyao, Kouichiro Kouge, Tsukasa Hori, Hakaru Mizoguchi, Shinji Nagai, Tamotsu Abe, Saito Takashi, Yoshifumi Ueno, Yukio Watanabe, Hideyuki Hayashi
المصدر: Journal of Photopolymer Science and Technology. 33:37-44
مصطلحات موضوعية: Light source, Optics, Materials science, Polymers and Plastics, business.industry, Extreme ultraviolet lithography, Organic Chemistry, Materials Chemistry, business, Power (physics), Magnetic field
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::200a4a2d852cc3979d52d83ae1b73915
https://doi.org/10.2494/photopolymer.33.37 -
4
المؤلفون: Hakaru Mizoguchi, Hiroaki Tomuro, Yuichi Nishimura, Hirokazu Hosoda, Hiroaki Nakarai, Tamotsu Abe, Hiroshi Tanaka, Yukio Watanabe, Yutaka Shiraishi, Tatsuya Yanagiga, Georg Soumagne, Fumio Iwamoto, Shinji Nagai, Yoshifumi Ueno, Takashi Suganuma, Gouta Niimi, Takayuki Yabu, Tsuyoshi Yamada, Takashi Saitou
المصدر: International Conference on Extreme Ultraviolet Lithography 2021.
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::860276926d6d0770d696700e646f8b85
https://doi.org/10.1117/12.2600714 -
5
المؤلفون: Tamotsu Abe, Katsuhiko Ogasawara, Teppei Suzuki, Tomoko Shimoda, Sadako Yoshimura, Shintaro Tsuji
المصدر: Health Policy and Technology. 8:248-253
مصطلحات موضوعية: Sustainable business models, Service (business), Contingent valuation, Actuarial science, 030503 health policy & services, Health Policy, Biomedical Engineering, Intention to use, Tele health, Logistic regression, 03 medical and health sciences, 0302 clinical medicine, Willingness to pay, Value (economics), 030212 general & internal medicine, Business, 0305 other medical science
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6
المؤلفون: Tatsuya Yanagida, Hiroshi Tanaka, Tsuyoshi Yamada, Yutaka Shiraishi, Takashi Saitou, Tamotsu Abe, Takeshi Kodama, Georg Soumagne, Hiroaki Nakarai, Hakaru Mizoguchi, Yukio Watanabe, Tsukasa Hori
المصدر: Journal of Photopolymer Science and Technology. 32:77-86
مصطلحات موضوعية: Materials science, Semiconductor, Polymers and Plastics, business.industry, Extreme ultraviolet lithography, Organic Chemistry, Materials Chemistry, business, Engineering physics, High volume manufacturing, Power (physics)
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::48e9730f891fce0c12fd85e897986599
https://doi.org/10.2494/photopolymer.32.77 -
7
المؤلفون: Hiroaki Nakarai, Tatsuya Yanagida, Takashi Saitou, Tamotsu Abe, Tsuyoshi Yamada, Tsukasa Hori, Yutaka Shiraishi, George Sumangne, Yukio Watanabe, Hakaru Mizoguchi, Hiroshi Tanak
المصدر: Extreme Ultraviolet (EUV) Lithography XII.
مصطلحات موضوعية: Physics, Co2 laser, Semiconductor, Optics, business.industry, Amplifier, Extreme ultraviolet, Extreme ultraviolet lithography, Energy conversion efficiency, business, Lithography, Power (physics)
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::1b9b9bfd4be2c60de2defb6eddf034c6
https://doi.org/10.1117/12.2581910 -
8
المؤلفون: Hiroaki Nakarai, Yutaka Shiraishi, Yukio Watanabe, Shinji Nagai, Kenichi Miyao, Hakaru Mizoguchi, Yoshifumi Ueno, Georg Soumagne, Hideyuki Hayashi, Takayuki Yabu, Tatsuya Yanagida, Takahiro Tatsumi, Tamotsu Abe
المصدر: Extreme Ultraviolet Lithography 2020.
مصطلحات موضوعية: Co2 laser, Materials science, Light source, Optics, business.industry, Extreme ultraviolet lithography, Dual wavelength laser, business, Reflectivity, Power (physics), Magnetic field
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::522f4ac81025673766746c7f9fe1413f
https://doi.org/10.1117/12.2572689 -
9
المؤلفون: Tsuyoshi Yamada, Hiroaki Nakarai, Hirokazu Hosoda, Yukio Watanabe, Takashi Saitou, Nishimura Yuichi, Takashi Suganuma, Yutaka Shiraishi, Hakaru Mizoguchi, Yoshifumi Ueno, Georg Soumagne, Tamotsu Abe, Tatsuya Yanagiga, Gouta Niimi, Fumio Iwamoto, Shinji Nagai, Hiroaki Tomuro, Takayuki Yabu, Hiroshi Tanaka
المصدر: Extreme Ultraviolet Lithography 2020.
مصطلحات موضوعية: Physics, Semiconductor, Optics, Co2 laser, business.industry, Extreme ultraviolet lithography, Amplifier, Extreme ultraviolet, Energy conversion efficiency, business, Lithography, Power (physics)
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::4c6793f59fb32351be1dc6550ee73dab
https://doi.org/10.1117/12.2574707 -
10
المؤلفون: Tatsuya Yanagida, Takashi Saitou, Tsukasa Hori, Hiroaki Nakarai, Hakaru Mizoguchi, Yukio Watanabe, Yutaka Shiraishi, Tamotsu Abe, Hiroshi Tanaka, Georg Soumagne, Tsuyoshi Yamada
المصدر: Extreme Ultraviolet (EUV) Lithography XI.
مصطلحات موضوعية: Materials science, Co2 laser, Light source, Optics, Semiconductor, business.industry, Extreme ultraviolet lithography, Energy conversion efficiency, business, Reflectivity, Lithography, Power (physics)
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::d1c55452df1a2aee7a356f7b6de687e0
https://doi.org/10.1117/12.2549905