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المؤلفون: Jumpei Fukui, Volker Berghof, Shigeo Mizoroke, Tetsuji Onuki, Hamid R. Khorram, Makoto Osanai, Susumu Hagiwara
المصدر: 2012 SEMI Advanced Semiconductor Manufacturing Conference.
مصطلحات موضوعية: Microelectromechanical systems, Cost reduction, Depth of focus, Resist, Computer science, law, Electronic engineering, Wafer, Photolithography, Lithography, Maintenance engineering, law.invention
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::8f99c7c535b5b0161fa632585d66fe2c
https://doi.org/10.1109/asmc.2012.6212919 -
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المؤلفون: Tetsuji Onuki, Takahiro Yamamoto, Hajime Ichikawa, Takashi Gemma, T. Umeda, Fukuda Yusuke, Shigeru Nakayama
المصدر: Initiatives of Precision Engineering at the Beginning of a Millennium ISBN: 0792374142
مصطلحات موضوعية: Physics, Best fitting, business.industry, Null (mathematics), Zone plate, Lithography process, Coordinate-measuring machine, law.invention, Lens (optics), Interferometry, Optics, law, Homogeneous, business
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::c291f01ed9938ecc7d72730fe6750e27
https://doi.org/10.1007/0-306-47000-4_133 -
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المصدر: Applied Physics Letters. 65:1569-1571
مصطلحات موضوعية: Potassium hydroxide, Materials science, Nanostructure, Physics and Astronomy (miscellaneous), Silicon, Anodizing, business.industry, Analytical chemistry, chemistry.chemical_element, Isotropic etching, law.invention, chemistry.chemical_compound, chemistry, Etching (microfabrication), law, Optoelectronics, Scanning tunneling microscope, Photolithography, business
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المؤلفون: Tetsuji Onuki, Takahiro Yamamoto, Fukuda Yusuke, Toshiro Umeda, Shigeru Nakayama, Yuichi Takigawa, Hajime Ichikawa, Takashi Gemma
المصدر: Optical Fabrication and Testing.
مصطلحات موضوعية: Physics, Best fitting, business.industry, Null (mathematics), Zone plate, Coordinate-measuring machine, law.invention, Lens (optics), Interferometry, Optics, law, Homogeneous, Spatial frequency, business
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::218b8b0b851a7ea30ad9e5194ab5144c
https://doi.org/10.1364/oft.2002.owd4 -
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المؤلفون: Tetsuji Onuki, Katsumi Sugisaki, Sadao Aoki
المصدر: SPIE Proceedings.
مصطلحات موضوعية: Microscope, Fabrication, Materials science, business.industry, X-ray optics, Polishing, Microstructure, law.invention, Biological specimen, Optics, law, Microscopy, business, Absorption (electromagnetic radiation)
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::5d3ea5e905270f4b26163a61295cfdd8
https://doi.org/10.1117/12.132133 -
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المؤلفون: Shuuzou Sudo, Tetsuji Onuki, Kunio Nakajima, Katsumi Sugisaki, Tadayuki Ohchi, Sadao Aoki
المصدر: Japanese Journal of Applied Physics. 32:L1574
مصطلحات موضوعية: Spectrum analyzer, Chemistry, business.industry, Instrumentation, Detector, General Engineering, General Physics and Astronomy, chemistry.chemical_element, Plasma, Photoelectric effect, Laser, law.invention, Optics, X-ray photoelectron spectroscopy, law, Aluminium, Atomic physics, business