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1دورية أكاديمية
المؤلفون: Joseph A. Burg, Mark S. Oliver, Theo J. Frot, Mark Sherwood, Victor Lee, Geraud Dubois, Reinhold H. Dauskardt
المصدر: Nature Communications, Vol 8, Iss 1, Pp 1-8 (2017)
مصطلحات موضوعية: Science
وصف الملف: electronic resource
Relation: https://doaj.org/toc/2041-1723
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المؤلفون: Scott G. Isaacson, Geraud Dubois, Krystelle Lionti, Yusuke Matsuda, Theo J. Frot, Reinhold H. Dauskardt, Willi Volksen
المصدر: ACS Applied Materials & Interfaces. 10:27549-27554
مصطلحات موضوعية: chemistry.chemical_classification, Toughness, Materials science, Nanocomposite, Polymer science, Nanoporous, Intermolecular force, 02 engineering and technology, Polymer, 010402 general chemistry, 021001 nanoscience & nanotechnology, 01 natural sciences, Oligomer, 0104 chemical sciences, chemistry.chemical_compound, Brittleness, chemistry, Phase (matter), General Materials Science, 0210 nano-technology
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المؤلفون: Geraud Dubois, Marvi A. Matos, Liam S. Cavanaugh Pingree, Alpana N. Ranade, Reinhold H. Dauskardt, Theo J. Frot, Linying Cui
المصدر: ACS Applied Materials & Interfaces. 4:6587-6598
مصطلحات موضوعية: Materials science, Silicon, chemistry.chemical_element, Atmospheric-pressure plasma, Substrate (electronics), Adhesion, engineering.material, Boiling point, chemistry.chemical_compound, Coating, chemistry, Chemical engineering, visual_art, engineering, visual_art.visual_art_medium, Organic chemistry, General Materials Science, Methyl methacrylate, Polycarbonate
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المؤلفون: Reinhold H. Dauskardt, Joseph A. Burg, Victor Y. Lee, Theo J. Frot, Mark Oliver, Geraud Dubois, Mark H. Sherwood
المصدر: Nature Communications
Nature Communications, Vol 8, Iss 1, Pp 1-8 (2017)مصطلحات موضوعية: Materials science, Silicon, Science, Coordination number, General Physics and Astronomy, chemistry.chemical_element, Nanotechnology, 02 engineering and technology, 01 natural sciences, Condensed Matter::Disordered Systems and Neural Networks, General Biochemistry, Genetics and Molecular Biology, Article, Nanomaterials, Molecular dynamics, 0103 physical sciences, medicine, Molecule, lcsh:Science, 010302 applied physics, Network architecture, Multidisciplinary, Stiffness, General Chemistry, 021001 nanoscience & nanotechnology, Characterization (materials science), chemistry, lcsh:Q, medicine.symptom, 0210 nano-technology
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المؤلفون: Robert L. Bruce, Vaughn R. Deline, Sampath Purushothaman, Theo J. Frot, Teddie Magbitang, Willi Volksen, Geraud Dubois, Dolores C. Miller
المصدر: Advanced Functional Materials. 22:3043-3050
مصطلحات موضوعية: Interconnection, Materials science, Microporous material, Dielectric, Blanket, Condensed Matter Physics, Electronic, Optical and Magnetic Materials, Biomaterials, Electrochemistry, Wafer, Composite material, Porosity, Mesoporous material, Scaling
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المؤلفون: Willi Volksen, Nicolas Casiez, Maxime Darnon, Geraud Dubois, Thierry Chevolleau, Christophe Licitra, R. Hurand, Névine Rochat, Theo J. Frot, Thibaut David, Nicolas Posseme
المساهمون: Laboratoire des technologies de la microélectronique (LTM), Université Joseph Fourier - Grenoble 1 (UJF)-Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Centre National de la Recherche Scientifique (CNRS), Commissariat à l'énergie atomique et aux énergies alternatives - Laboratoire d'Electronique et de Technologie de l'Information (CEA-LETI), Direction de Recherche Technologique (CEA) (DRT (CEA)), Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Commissariat à l'énergie atomique et aux énergies alternatives (CEA), Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Université Joseph Fourier - Grenoble 1 (UJF)-Centre National de la Recherche Scientifique (CNRS)
المصدر: Journal of Vacuum Science and Technology
Journal of Vacuum Science and Technology, 2013, pp.B 31, 011207. ⟨10.1116/1.4770505⟩
Journal of Vacuum Science and Technology B
Journal of Vacuum Science and Technology B, 2013, pp.B 31, 011207. ⟨10.1116/1.4770505⟩مصطلحات موضوعية: 010302 applied physics, Fabrication, Materials science, Process Chemistry and Technology, 02 engineering and technology, Plasma, Dielectric, 021001 nanoscience & nanotechnology, 7. Clean energy, 01 natural sciences, Surfaces, Coatings and Films, Electronic, Optical and Magnetic Materials, Etching (microfabrication), 0103 physical sciences, Polymer chemistry, Materials Chemistry, Copolymer, Fluorocarbon, Electrical and Electronic Engineering, Composite material, 0210 nano-technology, Porosity, Porous medium, Instrumentation, ComputingMilieux_MISCELLANEOUS
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المؤلفون: Teddie Magbitang, P. M. Rice, Robert L. Bruce, Leslie E. Krupp, Stephan A. Cohen, G. Dubois, Theo J. Frot, W. Volksen, Sampath Purushothaman, Michael F. Lofaro
المصدر: 2012 IEEE International Interconnect Technology Conference.
مصطلحات موضوعية: Permittivity, Range (particle radiation), Materials science, law, Electronic engineering, Dielectric, STRIPS, Sensitivity (control systems), Plasma, Porosity, Critical dimension, Engineering physics, law.invention
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::ed8f7845b70099bf2393519230b6ebe4
https://doi.org/10.1109/iitc.2012.6251565 -
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المؤلفون: Reinhold H. Dauskardt, Willi Volksen, Theo J. Frot, Stephen M. Gates, Teddie Magbitang, G. Dubois, Mark Oliver
المصدر: 2011 IEEE International Interconnect Technology Conference.
مصطلحات موضوعية: Semiconductor industry, Pore size, Bridging (networking), Materials science, Silicon, chemistry, Plasma-enhanced chemical vapor deposition, chemistry.chemical_element, Nanotechnology, Chemical vapor deposition, IBM
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::7647589362eca27b51a9736498a57e50
https://doi.org/10.1109/iitc.2011.5940287 -
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المؤلفون: Dolores C. Miller, Sampath Purushothaman, Michael F. Lofaro, Teddie Magbitang, G. Dubois, Robert L. Bruce, Theo J. Frot, W. Volksen
المصدر: 2011 IEEE International Interconnect Technology Conference.
مصطلحات موضوعية: chemistry.chemical_classification, Materials science, Copper interconnect, Nanotechnology, Polymer, Dielectric, STRIPS, Blanket, law.invention, chemistry, law, Compatibility (mechanics), Porous medium, Porosity
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::173e3b8101d16c3bafc62c9d3bf8de75
https://doi.org/10.1109/iitc.2011.5940272 -
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المصدر: Advanced materials (Deerfield Beach, Fla.). 23(25)
مصطلحات موضوعية: chemistry.chemical_classification, Silicon, Materials science, Polymers, Surface Properties, Mechanical Engineering, Science, chemistry.chemical_element, Nanotechnology, Membranes, Artificial, Polymer, Materials testing, Ethylenes, Membrane, chemistry, Mechanics of Materials, Materials Testing, General Materials Science, Particle size, Thin film, Particle Size, Porosity, Porous medium