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المؤلفون: Shafaat Ahmed, Frieder H. Baumann, Wei-Tsu Tseng, Jusang Lee, Tien-Jen Cheng
المصدر: 2018 IEEE International Interconnect Technology Conference (IITC).
مصطلحات موضوعية: 010302 applied physics, Materials science, Annealing (metallurgy), business.industry, Copper interconnect, chemistry.chemical_element, 02 engineering and technology, 021001 nanoscience & nanotechnology, 01 natural sciences, Copper, Overburden, chemistry, 0103 physical sciences, Trench, Copper plating, Optoelectronics, Wafer, 0210 nano-technology, business, Nanoscopic scale
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::031ac32ec9c988fd4510c6be3253549e
https://doi.org/10.1109/iitc.2018.8430416 -
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المؤلفون: Shafaat Ahmed, Ketan Shah, Craig Child, Stephan Grunow, Dinesh Koli, Anbu Selvam Km Mahalingam, Adam da Silva, Tien-Jen Cheng, Mukta Sharma, Teng-Yin Lin
المصدر: 2017 28th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC).
مصطلحات موضوعية: Void (astronomy), Interconnection, Yield (engineering), Plating, Nucleation, Wafer, Composite material, Electroplating, Die (integrated circuit)
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::298867b129379d7d6b064f65fb42d6cc
https://doi.org/10.1109/asmc.2017.7969191 -
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المؤلفون: Shafaat Ahmed, Paul Findeis, Connie Nga Troung, Tien Jen Cheng, Stephan Grunow, Ronald Rothkranz, Jennifer Oakley, Troy Graves-Abe
المصدر: ECS Meeting Abstracts. :1900-1900
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المؤلفون: Shafaat Ahmed, Qiang Huang, Tien Jen Cheng, Paul Findeis, Dinesh R Koli, Connie Nga Troung, Stephan Grunow
المصدر: ECS Meeting Abstracts. :1909-1909
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المؤلفون: Edward Engbrecht, Junjing Bao, Philip L. Flaitz, Stephen M. Gates, Son Nguyen, A. Simon, Jihong Choi, Shao Beng Law, Eden Zielinski, Hosadurga Shobha, Dimitri R. Kioussis, Wei-Tsu Tseng, R. G. Filippi, Anthony D. Lisi, T. Lee, Tien-Jen Cheng, Naftali E. Lustig, Kaushik Chanda, Alfred Grill, Jason Gill
المصدر: 2010 IEEE International Interconnect Technology Conference.
مصطلحات موضوعية: Permittivity, Materials science, business.industry, Bilayer, Analytical chemistry, chemistry.chemical_element, Time-dependent gate oxide breakdown, Plasma, Dielectric, Capacitance, Electromigration, Copper, chemistry, Optoelectronics, business
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::58862e215753873f6bcca49042c73522
https://doi.org/10.1109/iitc.2010.5510761 -
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المؤلفون: Jacob Jorne, Tien-Jen Cheng, J. ‐S. Gau
المصدر: Journal of The Electrochemical Society. 137:93-95
مصطلحات موضوعية: Magnetic anisotropy, Renewable Energy, Sustainability and the Environment, Chemistry, Materials Chemistry, Electrochemistry, Substrate (chemistry), chemistry.chemical_element, Condensed Matter Physics, Cobalt, Surfaces, Coatings and Films, Electronic, Optical and Magnetic Materials, Nuclear chemistry
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المؤلفون: Jacob Jorne, Tien-Jen Cheng
المصدر: Chemical Engineering Science. 42:1635-1644
مصطلحات موضوعية: Convection, Chemistry, Applied Mathematics, General Chemical Engineering, Limiting current, Thermodynamics, Laminar flow, General Chemistry, Mechanics, Industrial and Manufacturing Engineering, Forced convection, Physics::Fluid Dynamics, Flow (mathematics), Combined forced and natural convection, Shear stress, Fluid dynamics
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