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1مؤتمرReal-time etching process monitoring and end-point detection with a time-of-flight mass spectrometer
المؤلفون: Gasc, Sebastien, Binda, Federico, Kanungo, Pratyush Das, Hofer, Lukas, Rothenberger, Maximilian
المصدر: 2024 35th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) SEMI Advanced Semiconductor Manufacturing Conference (ASMC), 2024 35th Annual. :01-04 May, 2024
Relation: 2024 35th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC)
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2مؤتمر
المؤلفون: He, Jiahuan
المصدر: 2023 IEEE 6th International Conference on Automation, Electronics and Electrical Engineering (AUTEEE) Automation, Electronics and Electrical Engineering (AUTEEE), 2023 IEEE 6th International Conference on. :986-991 Dec, 2023
Relation: 2023 IEEE 6th International Conference on Automation, Electronics and Electrical Engineering (AUTEEE)
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3دورية أكاديمية
المصدر: Journal of Applied Physics; 4/14/2024, Vol. 135 Issue 14, p1-8, 8p
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4دورية أكاديمية
المؤلفون: Wannenmacher, Anna, Lu, Wenchao, Amarasinghe, Chandika, Cerasoli, Frank, Donadio, Davide, Ahmed, Musahid
المصدر: Journal of Chemical Physics; 4/14/2024, Vol. 160 Issue 14, p1-16, 16p
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5دورية أكاديمية
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6دورية أكاديمية
المؤلفون: Vetrova, S.B., Usmanov, R.A., Antonov, N.N., Melnikov, A.D., Polishchuk, V.P.
المصدر: IEEE Transactions on Plasma Science IEEE Trans. Plasma Sci. Plasma Science, IEEE Transactions on. 51(4):1101-1106 Apr, 2023
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7دورية أكاديمية
المؤلفون: Mischnick, PetraAff1, IDs0021602405224w_cor1, Schleicher, Sarah
المصدر: Analytical and Bioanalytical Chemistry. 416(10):2527-2539
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8دورية أكاديمية
المؤلفون: Partington, Jordan M., Rana, Sahil, Szabo, DrewAff1, Aff2, Anumol, Tarun, Clarke, Bradley O.Aff1, IDs0021602305075x_cor5
المصدر: Analytical and Bioanalytical Chemistry. 416(4):895-912
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9دورية أكاديمية
المؤلفون: Nishimura, Hiroshi, Watanabe, Takashi
المصدر: Rapid Communications in Mass Spectrometry: RCM; 7/30/2024, Vol. 38 Issue 14, p1-7, 7p
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10دورية أكاديمية
المؤلفون: Cen, Xianyi, Fang, Yuhao, Chen, Zilong, Zhu, Xinhai
المصدر: Rapid Communications in Mass Spectrometry: RCM; Jul2024, Vol. 38 Issue 13, p1-14, 14p