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المؤلفون: Tomas Juodagalvis, Simonas Kičas, Kęstutis Juškevičius, Ramutis Drazdys, Giedrius Abromavičius, Rytis Buzelis
المصدر: Applied Surface Science. 453:477-481
مصطلحات موضوعية: Materials science, General Physics and Astronomy, 02 engineering and technology, Substrate (electronics), engineering.material, 01 natural sciences, law.invention, 010309 optics, Coating, law, Etching (microfabrication), 0103 physical sciences, Surface roughness, Plasma etching, business.industry, Surfaces and Interfaces, General Chemistry, Plasma, Polarizer, 021001 nanoscience & nanotechnology, Condensed Matter Physics, Laser, Surfaces, Coatings and Films, engineering, Optoelectronics, 0210 nano-technology, business