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1
المؤلفون: Fredrik Jonsson, Michael Wagner, Martin Friedrichs, Thomas Hughes, Thomas Ludewig, Peter Duerr, Peter Bjoernangen, Jan-Uwe Schmidt, Torbjörn Sandström, Ulrike Dauderstaedt, Andreas Bergstrom, Daniela Trenkler, Ingo Wullinger, Tino Schwaten, Tord Karlin, Dirk Rudloff, Peter Ronnholm
المصدر: SPIE Proceedings.
مصطلحات موضوعية: Materials science, Spatial light modulator, Pixel, business.industry, Laser, Multiplexing, law.invention, Optics, Modulation, law, Ultraviolet light, Optoelectronics, Integrated circuit packaging, business, Throughput (business)
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::373c208068d97d910b480f58ff477adf
https://doi.org/10.1117/12.2036533 -
2Improved CD uniformity for advanced masks using the Sigma7500 pattern generator and ProcessEqualizer
المؤلفون: Tord Karlin, Tom Newman, Hans Fosshaug, Robert Eklund, Anders Österberg, Jonas Hellgren
المصدر: 23rd European Mask and Lithography Conference.
مصطلحات موضوعية: Engineering, Spatial light modulator, Optics, business.industry, Digital pattern generator, Electronic engineering, Photomask, Mask data preparation, business, Throughput (business), Lithography, Sizing, Metrology
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::e487c24de5648b03f49e5764dcc23530
https://doi.org/10.1117/12.736923 -
3
المؤلفون: Thomas Ostrom, Tord Karlin, Mats Rosling, Jonas Måhlén, Per Carlqvist, Jesper Sallander, Per Askebjer, Andrzej Karawajczyk, Anders Österberg
المصدر: SPIE Proceedings.
مصطلحات موضوعية: Engineering, Spatial light modulator, Pixel, business.industry, law.invention, Optics, Optical proximity correction, law, Digital pattern generator, Distortion, Electronic engineering, Pattern matching, Photolithography, Photomask, business
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::b77c38b36bce207541258c84a05baa34
https://doi.org/10.1117/12.686196 -
4
المؤلفون: Tord Karlin, Henrik Sjoberg, Tom Newman, Mats Rosling, Jonas Måhlén, Thomas Ostrom
المصدر: SPIE Proceedings.
مصطلحات موضوعية: Engineering, business.industry, Addressability, law.invention, Optics, Resist, law, Digital pattern generator, Electronic engineering, Node (circuits), Pattern matching, Photolithography, Photomask, business, Lithography
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::796dd3eb1873f02c3269b0e54f8ee97b
https://doi.org/10.1117/12.681731 -
5
المؤلفون: Harald Schenk, Ulric Ljungblad, Tord Karlin, Peter Duerr, Hubert Lakner, Ulrike Dauderstädt
المصدر: SPIE Proceedings.
مصطلحات موضوعية: Materials science, Spatial light modulator, Pixel, business.industry, High voltage, Laser, Frame rate, law.invention, Surface micromachining, Optics, law, Hardware_INTEGRATEDCIRCUITS, Photolithography, business, Lithography
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::35c36c24241e5316b2e339076d1800ac
https://doi.org/10.1117/12.590082 -
6
المؤلفون: Ulric Ljungblad, Tor Sandstrom, Henrik Sjoeberg, Per Askebjer, Tord Karlin
المصدر: SPIE Proceedings.
مصطلحات موضوعية: Microelectromechanical systems, Engineering, Spatial light modulator, business.industry, Electrical engineering, Laser, Frame rate, law.invention, CMOS, law, Digital pattern generator, Electronic engineering, Node (circuits), Stepper, business
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::14c6983db57740578dd8b5ec0261c6be
https://doi.org/10.1117/12.590934 -
7
المؤلفون: Tord Karlin, Harald Schenk, Ulrike Dauderstaedt, Peter Duerr, Hubert Lakner
المصدر: SPIE Proceedings.
مصطلحات موضوعية: Materials science, Spatial light modulator, Pixel, business.industry, High voltage, Laser, law.invention, Surface micromachining, Optics, Modulation, law, Optoelectronics, Photolithography, business, Layer (electronics)
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::17522592772cab08eaf398e7d1195a5e
https://doi.org/10.1117/12.528798 -
8
المؤلفون: Tord Karlin, Lars Leonardsson, Mathias Krellmann, Peter Duerr, Uldis Berzinsh, Ulrike Dauderstaedt, Horst Wendrock
المصدر: Scopus-Elsevier
مصطلحات موضوعية: Spatial light modulator, Materials science, business.industry, Failure mechanism, Laser, Frame rate, Chip, law.invention, Optics, Optical modulator, Digital pattern generator, law, Optoelectronics, business, Microelectronic circuits
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::e2342abb69f7d9521f73a680cac6df69
http://www.scopus.com/inward/record.url?eid=2-s2.0-17044442061&partnerID=MN8TOARS -
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