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المؤلفون: Claude Ortolland, Naoto Horiguchi, Christoph Kerner, Thomas Chiarella, Pierre Eyben, Jean-Luc Everaert, Jose Ignacio del Agua Borniquel, Tze Poon, Kartik Santhanam, Peter Porshnev, Majeed Foad, Robert Schreutelkamp, Philippe Absil, Wilfried Vandervorst, Susan Felch, Thomas Hoffmann, Edmund G. Seebauer, Susan B. Felch, Amitabh Jain, Yevgeniy V. Kondratenko
المصدر: AIP Conference Proceedings.
مصطلحات موضوعية: Materials science, Spreading resistance profiling, business.industry, Doping, Transistor, Analytical chemistry, Capacitance, Plasma-immersion ion implantation, PMOS logic, Ion, law.invention, Ion implantation, law, Optoelectronics, business
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::10d9c0dae64a94bf8f29e4a5d64b8266
https://doi.org/10.1063/1.3033663 -
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المؤلفون: Tze Poon, Malgorzata Jurczak, Wilfried Vandervorst, B.J. Pawlak, Ray Duffy, J.I Del-Agua-Bomiquel, Jean-Luc Everaert
المصدر: Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures. 26:396
مصطلحات موضوعية: Materials science, Fin, Dopant, business.industry, Doping, Nanotechnology, Condensed Matter Physics, law.invention, CMOS, law, MOSFET, Optoelectronics, Wafer, Field-effect transistor, Electrical and Electronic Engineering, Resistor, business