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المؤلفون: Fredrik Jonsson, Michael Wagner, Martin Friedrichs, Thomas Hughes, Thomas Ludewig, Peter Duerr, Peter Bjoernangen, Jan-Uwe Schmidt, Torbjörn Sandström, Ulrike Dauderstaedt, Andreas Bergstrom, Daniela Trenkler, Ingo Wullinger, Tino Schwaten, Tord Karlin, Dirk Rudloff, Peter Ronnholm
المصدر: SPIE Proceedings.
مصطلحات موضوعية: Materials science, Spatial light modulator, Pixel, business.industry, Laser, Multiplexing, law.invention, Optics, Modulation, law, Ultraviolet light, Optoelectronics, Integrated circuit packaging, business, Throughput (business)
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::373c208068d97d910b480f58ff477adf
https://doi.org/10.1117/12.2036533 -
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المساهمون: Publica
مصطلحات موضوعية: Microelectromechanical systems, mirror array, Fabrication, business.industry, Computer science, Mechanical Engineering, Nanotechnology, micro-opto-electro-mechanical system, Condensed Matter Physics, Atomic and Molecular Physics, and Optics, Electronic, Optical and Magnetic Materials, Metrology, microscanner, photonic microsystem, Electronic engineering, Light beam, micromirror, Electricity, Micro-Opto-Electro-Mechanical Systems, Electrical and Electronic Engineering, Photonics, micro electro mechanical system, business, Phase modulation, spatial light modulator
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::c7c9fde43ae53770f39aae1819875386
https://publica.fraunhofer.de/handle/publica/208024 -
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المؤلفون: Tord Karlin, Harald Schenk, Ulrike Dauderstaedt, Peter Duerr, Hubert Lakner
المصدر: SPIE Proceedings.
مصطلحات موضوعية: Materials science, Spatial light modulator, Pixel, business.industry, High voltage, Laser, law.invention, Surface micromachining, Optics, Modulation, law, Optoelectronics, Photolithography, business, Layer (electronics)
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::17522592772cab08eaf398e7d1195a5e
https://doi.org/10.1117/12.528798 -
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المؤلفون: Marine Auvert, Ulrike Dauderstaedt, Detlef Kunze, Harald Schenk, Thor Bakke, Peter Duerr, Hubert Lakner
المصدر: MOEMS Display and Imaging Systems.
مصطلحات موضوعية: Physics, Spatial light modulator, Pixel, Spatial filter, business.industry, Physics::Optics, law.invention, Optical modulator, Optics, law, Deflection (engineering), Photolithography, business, Lithography, Aerial image
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::b7418ad8d7d0d7f15edd5e69279d764b
https://doi.org/10.1117/12.477803 -
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المصدر: SPIE Proceedings.
مصطلحات موضوعية: Fabrication, Materials science, business.industry, Optical engineering, Laser, law.invention, Optics, CMOS, law, Ultraviolet light, Optoelectronics, Photomask, Photolithography, business, Lithography
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::65e694c572181cc5de2264a022ec3e78
https://doi.org/10.1117/12.443094 -
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المؤلفون: Tord Karlin, Lars Leonardsson, Mathias Krellmann, Peter Duerr, Uldis Berzinsh, Ulrike Dauderstaedt, Horst Wendrock
المصدر: Scopus-Elsevier
مصطلحات موضوعية: Spatial light modulator, Materials science, business.industry, Failure mechanism, Laser, Frame rate, Chip, law.invention, Optics, Optical modulator, Digital pattern generator, law, Optoelectronics, business, Microelectronic circuits
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::e2342abb69f7d9521f73a680cac6df69
http://www.scopus.com/inward/record.url?eid=2-s2.0-17044442061&partnerID=MN8TOARS