-
1دورية أكاديمية
المؤلفون: Cho, Choong-Rae, Cho, SungIl, Vadim, Sidorkin, Jung, Ranju, Yoo, Inkyeong
المصدر: In Thin Solid Films 2006 495(1):375-379
-
2
المؤلفون: G. R. Cantrell, Vadim Sidorkin, Stefan Proske, Stephan Zimmermann, Markus Bender, Michael Finken
المصدر: Extreme Ultraviolet (EUV) Lithography X.
مصطلحات موضوعية: Optics, Computer science, business.industry, Extreme ultraviolet lithography, Process (computing), Wafer, Mean-shift, Photomask, business, Fiducial marker, Blank, Electron-beam lithography
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::a985fb7e7179273873c5c6718a187171
https://doi.org/10.1117/12.2513666 -
3
المؤلفون: Nadir S. Faradzhev, Vadim Sidorkin
المصدر: Journal of Vacuum Science & Technology A, 27 (2), 2009
مصطلحات موضوعية: Materials science, Hydrogen, oxidation, nucleation, tin compounds, Nucleation, Analytical chemistry, chemistry.chemical_element, Overlayer, photoelectron spectra, X-ray photoelectron spectroscopy, tin, tin tetrahydride, ruthenium, tin oxide, Wetting layer, wetting, grain boundaries, Surfaces and Interfaces, Condensed Matter Physics, Surfaces, Coatings and Films, thin films, Low-energy ion scattering, chemistry, adsorption, hydrogen, ion-surface impact, Crystallite, Wetting, scanning electron microscopy, ruthenium oxide, atomic hydrogen
وصف الملف: application/pdf
-
4
المؤلفون: H. W. M. Salemink, Vadim Sidorkin, Emile van der Drift
المصدر: Journal of Vacuum Science & Technology B, 26 (6), 2008
مصطلحات موضوعية: atomic force microscopy, Materials science, Scanning electron microscope, Resist temperature, Analytical chemistry, resists, hydrogen silsesquioxane, Condensed Matter Physics, Aspect ratio (image), chemistry.chemical_compound, Laser linewidth, electron beam lithography, Resist, chemistry, Cathode ray, electron beam heating, Electrical and Electronic Engineering, Electron beam-induced deposition, organic compounds, Hydrogen silsesquioxane, scanning electron microscopy, Electron-beam lithography
وصف الملف: application/pdf
-
5
المصدر: Journal of Electroceramics. 17:479-485
مصطلحات موضوعية: Materials science, Band gap, business.industry, Astrophysics::High Energy Astrophysical Phenomena, Lithium niobate, chemistry.chemical_element, Electron, Condensed Matter Physics, Molecular physics, Electronic, Optical and Magnetic Materials, Pyroelectricity, chemistry.chemical_compound, Field electron emission, Optics, chemistry, Mechanics of Materials, Materials Chemistry, Ceramics and Composites, Lithium, Electrical and Electronic Engineering, business, Single crystal, Pyroelectric crystal
-
6
المؤلفون: Noriaki Nakayamada, Vadim Sidorkin, Michael Finken, Timo Wandel, G. R. Cantrell
المصدر: SPIE Proceedings.
مصطلحات موضوعية: Materials science, Resist, Calibration, Electronic engineering, Mechanical engineering, Overlay, Photomask, Lithography, Blank, Electron-beam lithography, Compensation (engineering)
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::96b2c9c92a043a4b8f4d3572842b77b0
https://doi.org/10.1117/12.2066126 -
7
المصدر: Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures. 24:224
مصطلحات موضوعية: Physics, business.industry, Electron, Condensed Matter Physics, Magnetic field, Optics, Distortion, Coulomb, Perpendicular, Cathode ray, Electrical and Electronic Engineering, business, Lithography, Electron-beam lithography