المؤلفون: Martini, Irene, Alessandri, Anna, Carminati, Marta, Carminati, Roberto, Ferrarini, Paolo, Gatti, Daniela A. L., Gianola, Riccardo, Lazarova, Borka, Lazzari, Carla M., Nomellini, Andrea, Oggioni, Laura, Pedrini, Claudia, Prelini, Carlo L., Tacchini, Riccardo, Vimercati, Michele

المصدر: 2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS) Micro Electro Mechanical Systems (MEMS), 2023 IEEE 36th International Conference on. :716-719 Jan, 2023

Relation: 2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS)

المؤلفون: Picco, Andrea^Aff6, Ferrari, Paolo^Aff6, Pedrini, Claudia^Aff6, Cimmino, Angela^Aff6, Vinciguerra, Lorenzo^Aff6, Vimercati, Michele^Aff6, Barulli, Alberto^Aff6, Lazzari, Carla Maria^Aff6

المساهمون: Vigna, Benedetto, editor^Aff1, Ferrari, Paolo, editor^Aff2, Villa, Flavio Francesco, editor^Aff3, Lasalandra, Ernesto, editor^Aff4, Zerbini, Sarah, editor^Aff5

المصدر: Silicon Sensors and Actuators : The Feynman Roadmap. :293-344