المؤلفون: S. Ballandras, E. Courjon, F. Bernard, W. Daniau, T. Laroche, I. Huyet, A. Drouin, I. Radu, E. Butaud, C. Lacroix, T. Baron

المصدر: 2019 Joint Conference of the IEEE International Frequency Control Symposium and European Frequency and Time Forum (EFTF/IFC).

مصطلحات موضوعية: Materials science, Silicon, 010308 nuclear & particles physics, business.industry, Wafer bonding, Composite number, Surface acoustic wave, chemistry.chemical_element, 01 natural sciences, 030218 nuclear medicine & medical imaging, 03 medical and health sciences, 0302 clinical medicine, chemistry, Filter (video), Assisted GPS, 0103 physical sciences, Optoelectronics, business, Single crystal, Layer (electronics)

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::e7cfb7931dab532c3fa084970c3b4513
https://doi.org/10.1109/fcs.2019.8856052

المؤلفون: S. Ballandras, J. Garcia, Thierry Baron, E. Courjon, T. Laroche, W. Daniau, S. Alzuaga

المساهمون: Frec|N|Sys (Frec|N|Sys), Franche-Comté Électronique Mécanique, Thermique et Optique - Sciences et Technologies (UMR 6174) (FEMTO-ST), Université de Technologie de Belfort-Montbeliard (UTBM)-Ecole Nationale Supérieure de Mécanique et des Microtechniques (ENSMM)-Université de Franche-Comté (UFC), Université Bourgogne Franche-Comté [COMUE] (UBFC)-Université Bourgogne Franche-Comté [COMUE] (UBFC)-Centre National de la Recherche Scientifique (CNRS), SENSeOR SAS (SENSeOR SAS), Université de Franche-Comté (UFC), Université Bourgogne Franche-Comté [COMUE] (UBFC)-Université Bourgogne Franche-Comté [COMUE] (UBFC)

المصدر: Physics Procedia
Physics Procedia, 2015, 70, pp.1012-1016

مصطلحات موضوعية: Data set, [SPI.OTHER]Engineering Sciences [physics]/Other, Resonator, Materials science, Admittance, Acoustics, Surface acoustic wave, Dispersion (optics), Thermal, Harmonic, Physics and Astronomy(all), Temperature coefficient

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::faa504183109376c3f7970660de286a6

المؤلفون: W. Daniau, J.-B. Moulet, S. Ballandras, E. Courjon, Thierry Baron, T. Signamarcheix

المساهمون: Frec|N|Sys (Frec|N|Sys), Franche-Comté Électronique Mécanique, Thermique et Optique - Sciences et Technologies (UMR 6174) (FEMTO-ST), Université de Technologie de Belfort-Montbeliard (UTBM)-Ecole Nationale Supérieure de Mécanique et des Microtechniques (ENSMM)-Université de Franche-Comté (UFC), Université Bourgogne Franche-Comté [COMUE] (UBFC)-Université Bourgogne Franche-Comté [COMUE] (UBFC)-Centre National de la Recherche Scientifique (CNRS), Commissariat à l'énergie atomique et aux énergies alternatives (CEA), Université de Technologie de Belfort-Montbeliard (UTBM)-Ecole Nationale Supérieure de Mécanique et des Microtechniques (ENSMM)-Centre National de la Recherche Scientifique (CNRS)-Université de Franche-Comté (UFC), Université Bourgogne Franche-Comté [COMUE] (UBFC)-Université Bourgogne Franche-Comté [COMUE] (UBFC)

المصدر: Physics Procedia
Physics Procedia, 2015, 70, pp.1007-1011
Physics Procedia, 2015, 2015 ICU International Congress on Ultrasonics May 2015 Metz, 70, pp.1007-1011. ⟨10.1016/j.phpro.2015.08.210⟩

مصطلحات موضوعية: [SPI.OTHER]Engineering Sciences [physics]/Other, Fabrication, Materials science, Silicon, business.industry, chemistry.chemical_element, Direct bonding, Physics and Astronomy(all), Piezoelectricity, Resonator, chemistry.chemical_compound, Thermoelastic damping, chemistry, Lithium tantalate, Optoelectronics, Wafer, business

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::509caee3c8ba2ba37c30b7b23449226f
https://hal.archives-ouvertes.fr/hal-02993743

المؤلفون: W. Daniau, S. Kiryenko, P. Blind, Jean-Pierre Goedgebuer, Henri Porte, V. Gorel

المصدر: Journal of Lightwave Technology. 17:229-233

مصطلحات موضوعية: Materials science, business.industry, Physics::Optics, Optical ring resonators, Mach–Zehnder interferometer, Pressure sensor, Waveguide (optics), Atomic and Molecular Physics, and Optics, law.invention, Interferometry, Surface micromachining, chemistry.chemical_compound, Optics, Silicon nitride, chemistry, law, Silicon bandgap temperature sensor, business

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::ba289ec537953ff85e442aa54d0e1a94
https://doi.org/10.1109/50.744229

المؤلفون: S. Ballandras, Thierry Baron, B. Dulmet, H. Wang, W. Daniau

المصدر: 2013 Joint IEEE International Symposium on Applications of Ferroelectric and Workshop on Piezoresponse Force Microscopy (ISAF/PFM).

مصطلحات موضوعية: Electromechanical coupling coefficient, Materials science, Piezoelectric coefficient, Condensed matter physics, business.industry, Wave propagation, Surface acoustic wave, Transverse wave, Computer Science::Other, Condensed Matter::Materials Science, Optics, Lamb waves, Surface wave, business, Longitudinal wave

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::e4130164f56f53b4b06ec2e5212e1cdc
https://doi.org/10.1109/isaf.2013.6748729

المؤلفون: W. Daniau, E. Bigler, J.‐C. Renaud, C. Bonjour, Sylvain Ballandras, E. Gavignet

المصدر: Journal of Applied Physics. 79:8944-8950

مصطلحات موضوعية: Pressing, Resonator, Optics, Materials science, business.industry, Shear horizontal, Surface wave, Surface acoustic wave, General Physics and Astronomy, Transverse wave, business, Polarization (waves), Quartz

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::193e07a2fe6dae70dd609f4b7e362e48
https://doi.org/10.1063/1.362625

المؤلفون: C. Bonjour, W. Daniau, E. Bigler, Sylvain Ballandras, J.‐C. Renaud, E. Gavignet

المصدر: Journal de Physique III. 6:105-120

مصطلحات موضوعية: Physics, General Engineering, Quartz resonator, General Physics and Astronomy, Humanities

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::371b8a213b1e250c22636a2781645867
https://doi.org/10.1051/jp3:1996110

المؤلفون: D. Hauden, P. Berçot, W. Daniau, Sylvain Ballandras

المصدر: Matériaux & Techniques. 82:17-22

مصطلحات موضوعية: Engineering drawing, Engineering, Fabrication, business.industry, Nanotechnology, law.invention, Resist, law, Electroforming, General Materials Science, Photolithography, LIGA, business, Microfabrication

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::5fbda3b1a1e026dc8b5869c6195c6781
https://doi.org/10.1051/mattech/199482060017

المؤلفون: W. Daniau, Sylvain Ballandras, P. Berçot, D. Hauden

المصدر: Materials Science and Engineering: A. 160:5-8

مصطلحات موضوعية: Materials science, Fabrication, Mechanical Engineering, Nanotechnology, Condensed Matter Physics, law.invention, Mechanics of Materials, law, Electroforming, Hardware_INTEGRATEDCIRCUITS, Forensic engineering, General Materials Science, Photolithography, Microfabrication

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::0128be4c4c60b4456b47eb8d7b4aeaec
https://doi.org/10.1016/0921-5093(93)90461-m

المؤلفون: M.F. Ravet, S. Ballandras, M. Rouillay, A. Labeque, S. Rocher, Zewen Liu, Laurent Robert, W. Daniau, D. Robert, F. Rousseaux, S. Megtert, P. Bernede, P. Blind, D. Hauden, Skandar Basrour

المساهمون: Laboratoire de Physique et Métrologie des Oscillateurs, Cancéropôle du Grand Est-Centre National de la Recherche Scientifique (CNRS)-Université de Franche-Comté (UFC), Université Bourgogne Franche-Comté [COMUE] (UBFC)-Université Bourgogne Franche-Comté [COMUE] (UBFC), CETEHOR [Département technique du Comité FRANCECLAT], Comité Francéclat, Laboratoire pour l'utilisation du rayonnement électromagnétique (LURE), Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-MENRT-Centre National de la Recherche Scientifique (CNRS)

المصدر: INRIA/IEEE Symposium on Emerging Technologies and Factory Automation. ETFA'95. 10-13 Oct.
INRIA/IEEE Symposium on Emerging Technologies and Factory Automation. ETFA'95. 10-13 Oct., 1995, Paris, France. pp.271-4, ⟨10.1109/ETFA.1995.496667⟩

مصطلحات موضوعية: 0209 industrial biotechnology, Cantilever, Fabrication, Computer science, business.industry, 02 engineering and technology, fabrication, 021001 nanoscience & nanotechnology, Surface micromachining, 020901 industrial engineering & automation, Grippers, Electronic engineering, Microelectronics, [SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics, 0210 nano-technology, Actuator, LIGA, business, LIGA-techniques, microelectronics-technology, Realization (systems)

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::193b5bfa3452e1b155d3d84844070207
https://hal.archives-ouvertes.fr/hal-00008927