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المؤلفون: Jayakumar, Ganesh, Hellström, Per-Erik, 1970, Östling, Mikael
المصدر: Microelectronic Engineering. 212:13-20
مصطلحات موضوعية: Biosensor, CMOS compatible, FEOL, HfO 2, LOC, Silicon nanowire access, Biosensors, CMOS integrated circuits, Electrodes, Fluidic devices, Hafnium oxides, Lithography, Metals, Microfluidics, MOS devices, Nanosensors, Nanowires, Oxide semiconductors, Reactive ion etching, Silica, Silicon oxides, Silicon wafers, Threshold voltage, WSI circuits, Biosensing applications, Complementary metal oxide semiconductor process, HfO2, Manufacturing process, Silicon nanowires, Threshold voltage variation, Nitrogen compounds
وصف الملف: print
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المؤلفون: Spyropoulou, Maria, Kanakis, Giannis, Jiao, Yuqing, Stabile, Ripalta, Calabretta, Nicola, Williams, Kevin, Nodjiadjim, Virginie, Hersent, Romain, Konczykowska, Agnieska, Schatz, Richard, Ozolins, Oskars, Joharifar, Mahdieh, Zverina, Jakub, Zoldák, Martin, Bakopoulos, Paraskevas, Patronas, Giannis, Avramopoulos, Hercules
المصدر: Proceedings of SPIE - The International Society for Optical Engineering.
مصطلحات موضوعية: 1Tb/s transceivers, co-packaged optics, datacenter interconnects, InP membranes, InPDHBT electronics, optical space switches, photonic integration, wafer-bonding, 5G mobile communication systems, Fiber optic networks, III-V semiconductors, Indium phosphide, Network architecture, Optical switches, Semiconducting indium phosphide, Time switches, Transceivers, Wafer bonding, WSI circuits, Interconnect networks, Internet traffic, Modular architectures, Novel architecture, Optical space switch, Stringent requirement, Technology upgrade, Traffic growth, Optical transceivers
وصف الملف: print
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3
المؤلفون: Bıyıklı, Necmi, Haider A.
المساهمون: Bıyıklı, Necmi
المصدر: Semiconductor Science and Technology
مصطلحات موضوعية: Atoms, Thin films, III-Nitride, Metal nanoparticles, IIInitride, Semiconductor growth, WSI circuits, Catalysis, Selenium compounds, Dielectric materials, Semiconductor materials, Coatings, Semiconductor devices, Yarn, Nanotechnology, Deposition, self-limiting, Metal-oxide, Flexible electronics, Nano-structured, Protective coatings, Atomic layer deposition, Temperature, Semiconductor, Nanostructured materials, Transition metals, Energy conversion, Nanostructures, Nanoscale, Metals, Chemical sensors, Deposits, Metal oxides, Nano scale, Nanostructured, Surface reactions
وصف الملف: application/pdf
URL الوصول: https://explore.openaire.eu/search/publication?articleId=od______3533::b39d189a5260745d285db1a5ff32e73b
https://hdl.handle.net/11693/38223 -
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المؤلفون: Samel, Björn, Chretien, Julien, Yue, Ruifeng, Griss, Patrick, Stemme, Göran
المصدر: Journal of microelectromechanical systems. 16(4):795-801
مصطلحات موضوعية: Fabrication, Fluidics, Micropumps, Wafer-scale integration, Actuators, Bending (deformation), Buckling, Composite films, Microspheres, Pumps, Temperature, WSI circuits, Composite actuators, Microliter-range pumps, Wafer-level fabrication scheme, Microfluidics, TECHNOLOGY, Electrical engineering, electronics and photonics, TEKNIKVETENSKAP, Elektroteknik, elektronik och fotonik
وصف الملف: print
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المؤلفون: Onur Fidaner, David A. B. Miller, V.A. Sabnis, Jun-Fei Zheng, James S. Harris, Hilmi Volkan Demir, J. Hanberg
المساهمون: Demir, Hilmi Volkan
المصدر: IEEE Transactions on Semiconductor Manufacturing
مصطلحات موضوعية: Materials science, Passivation, Wafer-scale integration, WSI circuits, Leakage currents, Industrial and Manufacturing Engineering, law.invention, Dielectric materials, law, Chemical-mechanical planarization, Integrated optoelectronics, Optical switches, Wafer, Electrical and Electronic Engineering, Aromatic polymers, Photodiodes, Electric breakdown, Leakage (electronics), Benzocyclobutene (BCB) polymer, Semiconductor device manufacturing, business.industry, Semiconductor device manufacture, Masks, Semiconductor device, Condensed Matter Physics, Electronic, Optical and Magnetic Materials, Photodiode, Etching, Electroabsorption, Planarization, Optoelectronics, Undercut, business
وصف الملف: application/pdf
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المؤلفون: Ersin Huseyinoglu, Erol Ozgur, Aykutlu Dana
المصدر: Applied Optics
مصطلحات موضوعية: Materials science, Fabrication, Materials Science (miscellaneous), 02 engineering and technology, Thermal treatment, Optoelectronic devices, WSI circuits, Industrial and Manufacturing Engineering, Photonic integrated circuits, Surface roughness, 020210 optoelectronics & photonics, Optics, Optical microcavities, Atomic levels, 0202 electrical engineering, electronic engineering, information engineering, Resonators, Wafer, Business and International Management, Electronic circuit, Quantum optics, Micro resonators, Photonic devices, business.industry, Silica, Optical microresonators, 021001 nanoscience & nanotechnology, Microcavities, Large-scale fabrication, Micro-fabrication techniques, Optoelectronics, 0210 nano-technology, business, Biosensor, High-Q microcavity, Microfabrication
وصف الملف: application/pdf
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::5081a25f2b1d3eb497528f9eefb7e8d5
https://doi.org/10.1364/ao.56.002489 -
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مصطلحات موضوعية: Mathematical models, Boundary conditions, Multi-wafer batch reactor, Computer simulation, WSI circuits, Physics::Geophysics, Computer Science::Other, Atomic layer deposition (ALD), Diffusion, Knudsen diffusion, Trench, Electric reactors, Molecular deposition, Chemical vapor deposition, Electronics, Simulation
URL الوصول: https://explore.openaire.eu/search/publication?articleId=dris___00893::303391b00daf80682bc0c855c499d502
http://resolver.tudelft.nl/uuid:feea696e-b889-4ea4-9f70-c65923e76608 -
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المساهمون: TNO Industrie en Techniek
المصدر: Surface and Coatings Technology, 22-23 Spec. iss., 201, 8842-8848
مصطلحات موضوعية: Materials science, Chemical vapor deposition, WSI circuits, Physics::Geophysics, Diffusion, Trench, Molecular deposition, Materials Chemistry, Electronic engineering, Wafer, Boundary value problem, Mathematical models, Boundary conditions, Mathematical model, Scattering, Multi-wafer batch reactor, Surfaces and Interfaces, General Chemistry, Mechanics, Computer simulation, Condensed Matter Physics, Computer Science::Other, Surfaces, Coatings and Films, Atomic layer deposition (ALD), Knudsen diffusion, Electric reactors, Electronics, Order of magnitude, Simulation
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::84414bdb5706f8dc0f15acf6e4b27bd2
http://resolver.tudelft.nl/uuid:feea696e-b889-4ea4-9f70-c65923e76608 -
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المؤلفون: Soares, F. M., Baek, J. H., Fontaine, N. K., Zhou, X., Wang, Y., Scott, R. P., Heritage, J. P., Junesand, Carl, Lourdudoss, Sebastian, 1953, Liou, K. Y., Hamm, R. A., Wang, W., Patel, B., Vatanapradit, S., Gruezke, L. A., Tsang, W. T., Yoo, S. J. B.
المصدر: Optics InfoBase Conference Papers.
مصطلحات موضوعية: III-V semiconductors, Indium phosphide, Michelson interferometers, Optical fibers, Semiconducting indium phosphide, WSI circuits, Amplitude modulators, Channel spacings, InP wafers, Integrated device, Monolithic integration, Monolithically integrated, Optical arbitrary waveform generations, Optical fiber communication
وصف الملف: print
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المؤلفون: Natarajan Ramanan, Arunn Narasimhan
المصدر: Journal of Micro/Nanolithography, MEMS, and MOEMS. 3:332
مصطلحات موضوعية: Chill plate, Photolithography, Chemically amplified resist, Computer science, Wafer bonding, Geometry, Mechanical engineering, Combination bake chill, Hardware_PERFORMANCEANDRELIABILITY, WSI circuits, Semiconductor materials, Proximity bake, Thermal, Hardware_INTEGRATEDCIRCUITS, Scanning, Wafer, Computer software, Electrical and Electronic Engineering, Thermal analysis, Navier–Stokes equations, Throughput (business), Productivity, Mathematical models, Photoresists, Temperature control, business.industry, Mechanical Engineering, Semiconductor device manufacture, Thermoanalysis, Computer simulation, Condensed Matter Physics, 3D modeling, Throughput, Atomic and Molecular Physics, and Optics, Electronic, Optical and Magnetic Materials, 300-nm resist processing, Bake plate, business, Aluminum
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::63e85b1f5b6e46c64768f3740a6e67e3
https://doi.org/10.1117/1.1668269