المؤلفون: Jing Chen, Yemin Dong, Xiang Wang, Wanbing Yi, Xi Wang

المصدر: 2003 IEEE International Conference on SOI SOI conference SOI Conference, 2003. IEEE International. :181-182 2003

Relation: 2003 IEEE International SOI Conference. Proceedings

المؤلفون: Kwang Sing Yew, Ran Xing Ong, Hin Kiong Yap, Wanbing Yi, Jacquelyn Phang, R. Chockalingam, Juan Boon Tan

المصدر: 2022 IEEE International Reliability Physics Symposium (IRPS).

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::d9037ef08e283d31b54661fdadfc8aed
https://doi.org/10.1109/irps48227.2022.9764428

المؤلفون: Jing Chen, Zhengxuan Zhang, Enxia Zhang, Xi Wang, Wanbing Yi

المصدر: Smart Materials and Structures. 14:N42-N45

مصطلحات موضوعية: Materials science, Spreading resistance profiling, Silicon, Annealing (metallurgy), Analytical chemistry, chemistry.chemical_element, Condensed Matter Physics, Nitrogen, Oxygen, Atomic and Molecular Physics, and Optics, Secondary ion mass spectrometry, chemistry, Mechanics of Materials, Transmission electron microscopy, Signal Processing, General Materials Science, Wafer, Electrical and Electronic Engineering, Civil and Structural Engineering

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::aaaf1dd2ae1db595a4e594861e50cd31
https://doi.org/10.1088/0964-1726/14/4/n07

المؤلفون: Xiang Wang, Xi Wang, Yemin Dong, Zhihong Zheng, Jing Chen, Wanbing Yi, Zixin Lin

المصدر: Thin Solid Films. 472:309-316

مصطلحات موضوعية: Materials science, Silicon, Annealing (metallurgy), Metals and Alloys, Analytical chemistry, chemistry.chemical_element, Silicon on insulator, Surfaces and Interfaces, Surfaces, Coatings and Films, Electronic, Optical and Magnetic Materials, Ion, Ion implantation, chemistry, Transmission electron microscopy, Materials Chemistry, Wafer, Silicon oxide

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::62308182ac1cf16b19bd92ca47694796
https://doi.org/10.1016/j.tsf.2004.07.053

المؤلفون: Xiang Wang, Wanbing Yi, Yemin Dong, Jing Chen, Xi Wang

المصدر: 2003 IEEE International Conference on Robotics and Automation (Cat No 03CH37422) SOI-03).

مصطلحات موضوعية: Materials science, Silicon, Hydrogen, business.industry, Annealing (metallurgy), chemistry.chemical_element, Silicon on insulator, Plasma-immersion ion implantation, Oxygen, Ion implantation, chemistry, Optoelectronics, Irradiation, business

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::37d8ddbd22344b188c72961275c7c344
https://doi.org/10.1109/soi.2003.1242944

المؤلفون: Xi Wang, Enxia Zhang, Jing Chen, Bo Jin, Meng Chen, Xiang Wang, Yemin Dong, Wanbing Yi

المصدر: Extended Abstracts of the 2003 International Conference on Solid State Devices and Materials.

مصطلحات موضوعية: Surface (mathematics), Materials science, business.industry, Optoelectronics, Silicon on insulator, Nanotechnology, business, Planarity testing, Degree (temperature)

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::f26ab7fbdcb028ded1b6eade08ae061e
https://doi.org/10.7567/ssdm.2003.p9-9l