المؤلفون: Schellenberg, M.^{Aff1, IDs1040502200458w_cor1}, Wege, S., Wimmer, C. D., Heussel, C. P.

المصدر: Zeitschrift für Pneumologie. 19(5):312-315

المؤلفون: Schellenberg, M.^{Aff1, IDs10405022004679_cor1}, Wege, S., Wimmer, C. D., Heussel, C. P.

المصدر: Zeitschrift für Pneumologie. 19(5):316-317

المؤلفون: Stavrev, M., Scire, A., Vogt, M., Klingbeil, P., Chun-Cheng Liao, Gruss, S., Froehlich, H.-G., Mothes, K., Bauch, L., Wege, S., Thyssen, N.

المصدر: 2004 IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop (IEEE Cat. No.04CH37530) Advanced semiconductor manufacturing Advanced Semiconductor Manufacturing, 2004. ASMC '04. IEEE Conference and Workshop. :84-88 2004

Relation: 2004 IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop

المؤلفون: Rudolph, U., Weikmann, E., Kinne, A., Henke, A., VanHolt, P., Wege, S., Khan, A., Pamarthy, S., Schaftlein, F., Lill, T.

المصدر: 2004 IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop (IEEE Cat. No.04CH37530) Advanced semiconductor manufacturing Advanced Semiconductor Manufacturing, 2004. ASMC '04. IEEE Conference and Workshop. :89-92 2004

Relation: 2004 IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop

المؤلفون: Lang, N., Ropcke, J., Steinbach, A., Wege, S.

المصدر: IEEE Transactions on Plasma Science IEEE Trans. Plasma Sci. Plasma Science, IEEE Transactions on. 37(12):2335-2341 Dec, 2009

المؤلفون: Mueller, W., Aichmayr, G., Bergner, W., Goldbach, M., Hecht, T., Kudelka, S., Lau, F., Nuetzel, J., Orth, A., Schloesser, T., Scholz, A., Sieck, A., Spitzer, A., Strasser, M., Wand, P.-F., Wege, S., Weis, R.

المصدر: 2006 International Symposium on VLSI Technology, Systems, and Applications VLSI Technology, Systems, and Applications, 2006 International Symposium on. :1-2 Apr, 2006

Relation: 2006 International Symposium on VLSI Technology, Systems, and Applications

المؤلفون: Mueller, W., Aichmayr, G., Bergner, W., Erben, E., Hecht, T., Kapteyn, C., Kersch, A., Kudelka, S., Lau, F., Luetzen, J., Orth, A., Nuetzel, J., Schloesser, T., Scholz, A., Schroeder, U., Sieck, A., Spitzer, A., Strasser, M., Wang, P.-F., Wege, S., Weis, R.

المصدر: IEEE InternationalElectron Devices Meeting, 2005. IEDM Technical Digest. International Electron Devices Meeting 2005 Electron Devices Meeting, 2005. IEDM Technical Digest. IEEE International. :4 pp.-339 2005

Relation: International Electron Devices Meeting 2005

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المؤلفون: Qu, Y, Guan, R, Yu, L, Berkowitz, Oliver, David, R, Whelan, James, Ford, M, Wege, S, Qiu, L, Gilliham, M

مصطلحات موضوعية: Uncategorized

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::2737441dee42d9334c7d8dd642c05bde

المؤلفون: Paul, J., Beyer, V., Czernohorsky, M., Beug, M.F., Biedermann, K., Mildner, M., Michalowski, P., Schütze, E., Melde, T., Wege, S., Knöfler, R., Mikolajick, T.

المصدر: In Microelectronic Engineering 2010 87(5):1629-1633