يعرض 1 - 10 نتائج من 78 نتيجة بحث عن '"Wet anisotropic etching"', وقت الاستعلام: 1.16s تنقيح النتائج
  1. 1
    مؤتمر
    High Speed Silicon Wet Bulk Micromachining of Si{111} in KOH Based Solution

    المؤلفون: Rao, Avvaru Venkata Narasimha, Pal, Prem, Pandey, Ashok Kumar, Menon, P Krishna, Tanaka, Hiroshi, Sato, Kazuo

    المصدر: 2020 Symposium on Design, Test, Integration & Packaging of MEMS and MOEMS (DTIP) Design, Test, Integration & Packaging of MEMS and MOEMS (DTIP), 2020 Symposium on. :1-5 Jun, 2020

    Relation: 2020 Symposium on Design, Test, Integration & Packaging of MEMS and MOEMS (DTIP)

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  2. 2
    مؤتمر
    Wafer-Scale Fabrication of V-Shaped Silicon Nano-Slit Arrays

    المؤلفون: Chen, Qi, Wang, Yifan, Zhang, Hualv, Liu, Zewen

    المصدر: 2018 IEEE 13th Annual International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) Nano/Micro Engineered and Molecular Systems (NEMS), 2018 IEEE 13th Annual International Conference on. :511-514 Apr, 2018

    Relation: 2018 IEEE 13th Annual International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)

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  3. 3
    دورية أكاديمية
    High speed silicon wet anisotropic etching for applications in bulk micromachining: a review

    المؤلفون: Prem Pal, Veerla Swarnalatha, Avvaru Venkata Narasimha Rao, Ashok Kumar Pandey, Hiroshi Tanaka, Kazuo Sato

    المصدر: Micro and Nano Systems Letters, Vol 9, Iss 1, Pp 1-59 (2021)

    مصطلحات موضوعية: Wet anisotropic etching, Silicon, Micromachining, TMAH, KOH, NH2OH, Technology

    وصف الملف: electronic resource

    Relation: https://doaj.org/toc/2213-9621

    URL الوصول: https://doaj.org/article/76503e6a915d4cbfb8a3112cc69b1dea

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  4. 4
    دورية أكاديمية
    High speed silicon wet anisotropic etching for applications in bulk micromachining: a review

    المؤلفون: Pal, PremAff1, IDs40486021001290_cor1, Swarnalatha, Veerla, Rao, Avvaru Venkata Narasimha, Pandey, Ashok Kumar, Tanaka, Hiroshi, Sato, Kazuo

    المصدر: Micro and Nano Systems Letters. 9(1)

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  5. 5
    دورية أكاديمية
    A Novel 4$\, \times \,$4 Optical Switch Using an Anisotropically Etched Micromirror Array and a Bistable Mini-Actuator Array

    المؤلفون: Yang, Y.-J., Liao, B.-T.

    المصدر: IEEE Photonics Technology Letters IEEE Photon. Technol. Lett. Photonics Technology Letters, IEEE. 21(2):115-117 Jan, 2009

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  6. 6
    دورية أكاديمية
    Determination of precise crystallographic directions on Si{111} wafers using self-aligning pre-etched pattern

    المؤلفون: Avvaru Venkata Narasimha Rao, Veerla Swarnalatha, Ashok Kumar Pandey, Prem Pal

    المصدر: Micro and Nano Systems Letters, Vol 6, Iss 1, Pp 1-9 (2018)

    مصطلحات موضوعية: Silicon, Wet bulk micromachining, Alignment, Wet anisotropic etching, Si{111}, Technology

    وصف الملف: electronic resource

    Relation: http://link.springer.com/article/10.1186/s40486-018-0066-1; https://doaj.org/toc/2213-9621

    URL الوصول: https://doaj.org/article/4681d9a5fef34248945ec3db014b722f

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  7. 7
    دورية أكاديمية
    Etching characteristics of Si{110} in 20 wt% KOH with addition of hydroxylamine for the fabrication of bulk micromachined MEMS

    المؤلفون: A. V. Narasimha Rao, V. Swarnalatha, P. Pal

    المصدر: Micro and Nano Systems Letters, Vol 5, Iss 1, Pp 1-9 (2017)

    مصطلحات موضوعية: Wet anisotropic etching, Bulk micromachining, Silicon, Corner undercutting, KOH, MEMS, Technology

    وصف الملف: electronic resource

    Relation: http://link.springer.com/article/10.1186/s40486-017-0057-7; https://doaj.org/toc/2213-9621

    URL الوصول: https://doaj.org/article/433e8aa64ff7426c930b123c88f784cb

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  8. 8
    دورية أكاديمية
    Etching characteristics of Si{110} in 20 wt% KOH with addition of hydroxylamine for the fabrication of bulk micromachined MEMS

    المؤلفون: Rao, A. V. Narasimha, Swarnalatha, V., Pal, P.

    المصدر: Micro and Nano Systems Letters. December 2017 5(1):1-9

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  9. 9
    دورية أكاديمية
    Determination of precise crystallographic directions on Si{111} wafers using self-aligning pre-etched pattern

    المؤلفون: Narasimha Rao, Avvaru VenkataAff1, Swarnalatha, VeerlaAff1, Pandey, Ashok KumarAff2, Pal, PremAff1

    المصدر: Micro and Nano Systems Letters. 6(1)

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  10. 10
    دورية أكاديمية
    A simple and robust model to explain convex corner undercutting in wet bulk micromachining

    المؤلفون: Pal, Prem, Singh, Sajal Sagar

    المصدر: Micro and Nano Systems Letters. December 2013 1(1):1-6

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