المؤلفون: Narasimha Rao, Avvaru Venkata^Aff13, Pal, Prem^Aff14

المساهمون: Ceccarelli, Marco, Series Editor^Aff1, Agrawal, Sunil K., Advisory Editor^Aff2, Corves, Burkhard, Advisory Editor^Aff3, Glazunov, Victor, Advisory Editor^Aff4, Hernández, Alfonso, Advisory Editor^Aff5, Huang, Tian, Advisory Editor^Aff6, Jauregui Correa, Juan Carlos, Advisory Editor^Aff7, Takeda, Yukio, Advisory Editor^Aff8, Pandey, Ashok Kumar, editor^Aff9, Pal, Prem, editor^Aff10, Nagahanumaiah, editor^Aff11, Zentner, Lena, editor^Aff12

المصدر: Microactuators, Microsensors and Micromechanisms : MAMM 2022. 126:281-289

المؤلفون: V. Swarnalatha, S. Purohit, P. Pal, R. K. Sharma

المصدر: Micro and Nano Systems Letters, Vol 10, Iss 1, Pp 1-8 (2022)

مصطلحات موضوعية: Silicon, MEMS, Wet bulk micromachining, Wet etching, NaOH, NH2OH, Technology

وصف الملف: electronic resource

Relation: https://doaj.org/toc/2213-9621

URL الوصول: https://doaj.org/article/6deb5a9d65614875ad8eaf8b26d1029c

المؤلفون: Swarnalatha, V., Purohit, S., Pal, P.^{Aff1, IDs40486022001529_cor3}, Sharma, R. K.

المصدر: Micro and Nano Systems Letters. 10(1)

المؤلفون: Avvaru Venkata Narasimha Rao, Veerla Swarnalatha, Ashok Kumar Pandey, Prem Pal

المصدر: Micro and Nano Systems Letters, Vol 6, Iss 1, Pp 1-9 (2018)

مصطلحات موضوعية: Silicon, Wet bulk micromachining, Alignment, Wet anisotropic etching, Si{111}, Technology

وصف الملف: electronic resource

Relation: http://link.springer.com/article/10.1186/s40486-018-0066-1; https://doaj.org/toc/2213-9621

URL الوصول: https://doaj.org/article/4681d9a5fef34248945ec3db014b722f

المؤلفون: Narasimha Rao, Avvaru Venkata^Aff1, Swarnalatha, Veerla^Aff1, Pandey, Ashok Kumar^Aff2, Pal, Prem^Aff1

المصدر: Micro and Nano Systems Letters. 6(1)

المؤلفون: Ashok Kumar Pandey, Veerla Swarnalatha, Avvaru Venkata Narasimha Rao, Prem Pal

المصدر: Micro and Nano Systems Letters, Vol 6, Iss 1, Pp 1-9 (2018)

مصطلحات موضوعية: Bulk micromachining, Silicon, Materials science, Fabrication, Biomedical Engineering, chemistry.chemical_element, Wet bulk micromachining, 02 engineering and technology, Edge (geometry), 01 natural sciences, lcsh:Technology, Biomaterials, Crystal, 0103 physical sciences, Wafer, Alignment, 010302 applied physics, Microelectromechanical systems, lcsh:T, Si{111}, Wet anisotropic etching, 021001 nanoscience & nanotechnology, Crystallography, chemistry, 0210 nano-technology, Microfabrication

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::ad4a080fdb2d396a591a70586377f86d
http://link.springer.com/article/10.1186/s40486-018-0066-1

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