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المؤلفون: Xavier Buch, Jennifer Braggin, Kenji Hoshiko, Wim Schoallert
المصدر: SPIE Proceedings.
مصطلحات موضوعية: Pore size, Coating, Resist, business.industry, engineering, Membrane filter, Nanotechnology, engineering.material, Process engineering, business, Lithography, Immersion lithography
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::799cab9102ee3c684b6c135b77b96aa9
https://doi.org/10.1117/12.846346