المؤلفون: Soo-Geun Lee, Kyoung-Woo Lee, Il-Goo Kim, Wan-Jae Park, Young-Jin Wee, Won-Sang Song, Jae-Hak Kim, Seung-Jin Lee, Hyeok-Sang Oh, Yong-Tak Lee, Joo-Hyuk Chung, Ho-kyu Kang, Kwang-Pyuk Suh

المصدر: Digest. International Electron Devices Meeting, Electron devices meeting Electron Devices Meeting, 2002. IEDM '02. International. :591-594 2002

Relation: IEEE International Electron Devices Meeting

المؤلفون: Jeung-Woo Kim, Won-Sang Song, Sam-Young Kim, Hyan-Soo Kim, Hyun-Goo Jeon, Chae-Bog Lim

المصدر: Proceedings of the 2001 8th International Symposium on the Physical and Failure Analysis of Integrated Circuits. IPFA 2001 (Cat. No.01TH8548) Physical and failure analysis of integrated circuits Physical and Failure Analysis of Integrated Circuits, 2001. IPFA 2001. Proceedings of the 2001 8th International Symposium on the. :174-177 2001

Relation: Proceedings of the 2001 8th International Symposium on the Physical and Failure Analysis of Integrated Circuits. IPFA 2001

المؤلفون: Young-Jin Wee, Ki-Chul Park, Won-Sang Song, Hyeon-Deok Lee, Wo-Kyu Kang, Joo-Tae Moon

المصدر: Proceedings of the IEEE 2001 International Interconnect Technology Conference (Cat. No.01EX461) Interconnect technology conference Interconnect Technology Conference, 2001. Proceedings of the IEEE 2001 International. :260-262 2001

Relation: Proceedings of the IEEE 2001 International Interconnect Technology Conference

المؤلفون: Young Jin Wee, Soo Geun Lee, Won Sang Song, Kyoung-Woo Lee, Nam Hyung Lee, Ja Eung Ku, Ki-Kwan Park, Seung Jin Lee, Jae Hak Kim, Joo Hyuk Chung, Hong Jae Shin, Sang Rok Hah, Ho-Kyu Kang, Gwang Pyuk Suh

المصدر: IEEE International Electron Devices Meeting 2003 Electron devices IEDM'03 Electron Devices Meeting, 2003. IEDM '03 Technical Digest. IEEE International. :21.7.1-21.7.4 2003

Relation: IEEE International Electron Devices Meeting 2003

المؤلفون: J.-H. Chung, I.-R. Kim, Jeong-Hoon Ahn, K.-P. Suh, K.-T. Lee, Sun-jung Lee, J.-S. Chung, Ho-Kyu Kang, Bong-seok Suh, S.-R. Hah, Young-Jin Wee, Won-sang Song, Seung-Man Choi, Kyu-Charn Park

المصدر: Proceedings of the IEEE 2003 International Interconnect Technology Conference (Cat. No.03TH8695).

مصطلحات موضوعية: Permittivity, Materials science, Annealing (metallurgy), business.industry, Sputtering, Physical vapor deposition, Contact resistance, Trench, Electronic engineering, Optoelectronics, Dielectric, Chemical vapor deposition, business

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::ca9b37b4b9e6d2287c305e5d852a9f14
https://doi.org/10.1109/iitc.2003.1219743

المؤلفون: Sang Rok Hah, Ja Eung Ku, Soo Geun Lee, Won Sang Song, Joo Hyuk Chung, Ho-Kyu Kang, Young Jin Wee, Hong Jae Shin, Kyoung-Woo Lee, Seung-Jin Lee, Gwang Pyuk Suh, Jae Hak Kim, Nam Hyung Lee, Ki-Kwan Park

المصدر: IEEE International Electron Devices Meeting 2003.

مصطلحات موضوعية: Materials science, Moisture, Diffusion barrier, business.industry, chemistry.chemical_element, Dielectric, Dielectric thin films, Copper, Electromigration, Reliability (semiconductor), chemistry, Electronic engineering, Optoelectronics, Re engineering, business

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::62ee8fcc4f0baee19ad0f5c1abcdc81b
https://doi.org/10.1109/iedm.2003.1269338

المؤلفون: Hyeok-Sang Oh, Kyoung-Woo Lee, Seung-Jin Lee, Wan-jae Park, Jae-Hak Kim, Yong-Tak Lee, Soo-Geun Lee, Young-Jin Wee, Won-sang Song, Ho-Kyu Kang, Kwang-Pyuk Suh, Il-Goo Kim, Joo-Hyuk Chung

المصدر: Digest. International Electron Devices Meeting.

مصطلحات موضوعية: Engineering, Reliability (semiconductor), Resist, business.industry, Electronic engineering, Optoelectronics, Node (circuits), Dielectric thin films, business, Process complexity

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::0ebb7b0d337b9775044661c5a7f86fd3
https://doi.org/10.1109/iedm.2002.1175910

المؤلفون: Kwang Pyuk Suh, Hee-Soo Kang, Kyong Taek Lee, H.J. Yu, Chang Bong Oh, Kyoung-Soo Kim, Jung-Chak Ahn, Won-sang Song, Y.G. Wee, K.S. Jung, M.K. Jung, Geum-Jong Bae, Nae-In Lee, Deok-Hyung Lee, T.S. Park, Moon-han Park, Sangjoo Lee, Y.G. Ko, S.H. Liu, Chang-Hoon Jeon, Young Wug Kim, Byung Jun Oh

المصدر: Digest. International Electron Devices Meeting.

مصطلحات موضوعية: Materials science, business.industry, Transistor, Copper interconnect, Electrical engineering, Silicon on insulator, Capacitance, PMOS logic, law.invention, Gate oxide, law, Low-power electronics, Optoelectronics, business, NMOS logic

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::03770676f50bf22edbea0b3fe37525b4
https://doi.org/10.1109/iedm.2002.1175781

المؤلفون: Won-sang Song, Hyun-Goo Jeon, Sam-Young Kim, Chae-Bog Lim, Jeung-Woo Kim, Hyan-Soo Kim

المصدر: Proceedings of the 2001 8th International Symposium on the Physical and Failure Analysis of Integrated Circuits. IPFA 2001 (Cat. No.01TH8548).

مصطلحات موضوعية: Stress (mechanics), Materials science, Electrical resistivity and conductivity, Electronic engineering, Copper interconnect, Extrusion, Dielectric, Composite material, Electromigration, Failure mode and effects analysis, Thermal expansion

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::77a800aca5d8a5e8fbfb5dead3bb6d71
https://doi.org/10.1109/ipfa.2001.941480

المؤلفون: Wo-Kyu Kang, Hyeon-deok Lee, Won-sang Song, Joo-Tae Moon, Ki-Chul Park, Young-Jin Wee

المصدر: Proceedings of the IEEE 2001 International Interconnect Technology Conference (Cat. No.01EX461).

مصطلحات موضوعية: Interconnection, Materials science, business.industry, Doping, Copper interconnect, Low-k dielectric, chemistry.chemical_element, Dielectric, Electromigration, Copper, Reliability (semiconductor), chemistry, Electronic engineering, Optoelectronics, business

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::2677133b490399ce2c0215ede0db1371
https://doi.org/10.1109/iitc.2001.930078