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المؤلفون: Yuyang Bian, Biqiu Liu, Xijun Guan, Xiaobo Guo, Cong Zhang, Wenzhan Zhou, Jun Huang, Yu Zhang, Jiawang Song, Yang Gao, Shmuel Nissim, Kevin Houchens, Omri Baum, Qiang Zhou, Zaisan Yang, Amit Zakay, Tal Ayzik, Yaniv Abramovitz
المصدر: Metrology, Inspection, and Process Control XXXVI.
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::a5cda6b86bb61fe7eb7eee181d776b72
https://doi.org/10.1117/12.2614221 -
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المؤلفون: Yuyang Bian, Xijun Guan, Biqiu Liu, Xiaobo Guo, Cong Zhang, Wenzhan Zhou, Jun Huang, Yu Zhang, Lingyi Guo, Faquan Liu, Jinyan Song, Chunfei Sui
المصدر: 2021 International Workshop on Advanced Patterning Solutions (IWAPS).
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::86d68e7a03d1f90d926b5baa45ea0ce4
https://doi.org/10.1109/iwaps54037.2021.9671066 -
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المؤلفون: Xijun Guan, Xiaobo Guo, Yujie Xu, Cong Zhang, Yuyang Bian, Biqiu Liu, Dandan Hu, Song Gao, Yu Zhang, Lulu Lai, Jun Huang, Yongyu Yuan
المصدر: Metrology, Inspection, and Process Control for Semiconductor Manufacturing XXXV.
مصطلحات موضوعية: Optics, Materials science, Resist, Scanning electron microscope, business.industry, Cathode ray, Spectral density, Surface finish, Edge (geometry), business, Lithography, Noise (electronics)
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::3a130d25421b3b26293325f828e6075e
https://doi.org/10.1117/12.2583545 -
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المؤلفون: Yu Zhang, Yuyang Bian, Xiaobo Guo, Xijun Guan, Jun Huang, Cong Zhang, Biqiu Liu
المصدر: 2020 International Workshop on Advanced Patterning Solutions (IWAPS).
مصطلحات موضوعية: Materials science, business.industry, Autocorrelation, Spectral density, Surface finish, Edge (geometry), symbols.namesake, Optics, Fourier transform, Frequency domain, symbols, business, Lithography, Critical dimension
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::d543513a37994b33eb212913a2d0c897
https://doi.org/10.1109/iwaps51164.2020.9286797 -
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المؤلفون: Yu Zhang, Yuyang Bian, Jun Huang, Xijun Guan, Xiaobo Guo, Biqiu Liu, Hongxu Sun, Cong Zhang, Lipeng Wang
المصدر: 2020 China Semiconductor Technology International Conference (CSTIC).
مصطلحات موضوعية: 010302 applied physics, Materials science, Scanning electron microscope, 0103 physical sciences, Immersion (virtual reality), Cathode ray, Composite material, Photoresist, 01 natural sciences, Critical dimension, Lithography, Saturation (magnetic), Shrinkage
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::2cc31b705ad85aab515edd245f58d9fa
https://doi.org/10.1109/cstic49141.2020.9282495