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1دورية أكاديمية
المؤلفون: Ying-Fei Wang, Qing-Chun Zhang, Ping Li, Xiao-Jing Su, Li-Song Dong, Rui Chen, Li-Bin Zhang, Tian-Yang Gai, Ya-Juan Su, Ya-Yi Wei, Tian Chun Ye
المصدر: IEEE Journal of the Electron Devices Society, Vol 9, Pp 6-9 (2021)
مصطلحات موضوعية: Layout proximity effects, high-k HfO₂, stress memorization technique, Al diffusion, Electrical engineering. Electronics. Nuclear engineering, TK1-9971
وصف الملف: electronic resource
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2
المؤلفون: Libin Zhang, Pengzheng Gao, Ya Yi Wei
المصدر: Optical Microlithography XXXIV.
مصطلحات موضوعية: Set (abstract data type), Optical proximity correction, Computer science, Feature (computer vision), business.industry, Image quality, Contour line, Process (computing), Computer vision, Artificial intelligence, Extreme value theory, business, Chip
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::c8e3ab9a39fadde21134cb68890c3489
https://doi.org/10.1117/12.2583694