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المؤلفون: Yangro Lee, Joseph A. Levert, Joo Hoon Choi, Chad S. Korach, Louis E. DeMarco, Richard T. Leveille
المصدر: ASME/STLE 2007 International Joint Tribology Conference, Parts A and B.
مصطلحات موضوعية: Scanning probe microscopy, Materials science, Fabrication, Chemical-mechanical planarization, Abrasive, Delamination, Polishing, Nanotechnology, Wafer, Composite material, Tribometer
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::a7ec4a660b89754b14f07654fc770738
https://doi.org/10.1115/ijtc2007-44383