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المؤلفون: Hyungju Ryu, Dokyeong Kwon, Jiho Song, Wongi Park, Jinseong Gwak, Haram Ko, Jiyoung Lee, Jinpyoung Kim, Kyungseok Ryu, Sungjo Hwang, Taemin Jeong, Heeyoung Go, Yigwon Kim, Kyoungyong Cho, Sangjin Kim, Changmin Park
المصدر: Optical and EUV Nanolithography XXXVI.
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::20647236e9cb8fff729f13d4da5be7a8
https://doi.org/10.1117/12.2656415 -
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المؤلفون: Sangjin Kim, Il-Hwan Kim, Hyungju Ryu, Yongbeom Seo, Yigwon Kim, Jinhee Jang, Tae-Min Choi, Sol Jeong, Yongchul Jeong, Kyoungyong Cho, Cheolin Jang, Kyeongbeom Park, Changmin Park
المصدر: Optical and EUV Nanolithography XXXVI.
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::ff99dfcd8db9e56006c7b4a39f61469f
https://doi.org/10.1117/12.2658345