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1مؤتمر
المؤلفون: Sang-Jun Choi, Yool Kang, Jeong-Hee Chung, Sang-Gyun Woo, Joo-Tae Moon
المصدر: Digest of Papers Microprocesses and Nanotechnology 2000. 2000 International Microprocesses and Nanotechnology Conference (IEEE Cat. No.00EX387) Microprocesses and nanotechnology 2000 Microprocesses and Nanotechnology Conference, 2000 International. :96-97 2000
Relation: Digest of Papers Microprocesses and Nanotechnology 2000. 2000 International Microprocesses and Nanotechnology Conference
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2
المؤلفون: Suk-Joo Lee, Yun-Sook Chae, Han-Ku Cho, Doo-Youl Lee, Joo-Tae Moon, Yool Kang
المصدر: Japanese Journal of Applied Physics. 46:6135-6139
مصطلحات موضوعية: Materials science, Physics and Astronomy (miscellaneous), Passivation, business.industry, General Engineering, General Physics and Astronomy, Photoresist, Nitride, Optical proximity correction, Etching (microfabrication), Chemical-mechanical planarization, Multiple patterning, Optoelectronics, business, Lithography
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3
المؤلفون: Inn Yeal Oh, Mincheol Shin, Seung-Young Park, Chul Soon Park, Sun Yool Kang, Seong Jun Cho, Sangil Kim, Byoung-Chul Min, Hyuncheol Park, Chaun Jang, Hyunseok Choi
المصدر: SCIENTIFIC REPORTS(4)
Scientific Reportsمصطلحات موضوعية: Multidisciplinary, business.industry, Computer science, Transmitter, Article, Modulation, Rise time, Nano, Electronic engineering, Wireless, Demodulation, business, Telecommunications, Binary modulation, Microwave, Spectral purity
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::e9e2482dcb1c96c9d8ef8a8b40ddc1a2
http://open-repository.kisti.re.kr/cube/handle/open_repository/485081.do -
4
المؤلفون: Joo-Tae Moon, Dong-Won Jung, Tsutomu Tanaka, Sung-Ho Lee, Yool Kang, Sook Lee, Hyun-Woo Kim, Joe Mattia, Timothy G. Adams, Sang-Jun Choi, George G. Barclay, Sang-Gyun Woo, Stefan J. Caporale, Doris Kang, George W. Orsula, Robert J. Kavanagh
المصدر: Journal of Photopolymer Science and Technology. 14:363-371
مصطلحات موضوعية: Materials science, Polymers and Plastics, business.industry, Organic Chemistry, Nanotechnology, Surface finish, Substrate (electronics), Photoresist, Nitride, Resist, Materials Chemistry, Optoelectronics, Off-axis illumination, Dry etching, business, Lithography
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::41847cad5b678807206fa83e102c0ca8
https://doi.org/10.2494/photopolymer.14.363 -
5
المؤلفون: Sang-Jun Choi, Yool Kang, Moon Yong Lee, Joo-Tae Moon, Chun-Geun Park, Dong-Won Jung
المصدر: Journal of Photopolymer Science and Technology. 10:521-528
مصطلحات موضوعية: chemistry.chemical_classification, Materials science, Polymers and Plastics, Excimer laser, medicine.medical_treatment, Organic Chemistry, Polymer, Photoresist, Methacrylate, Alicyclic compound, chemistry, Resist, Chemical engineering, Polymer chemistry, Materials Chemistry, medicine, Thermal stability, Lithography
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::99324310e8d84e2158dc9cd603c9a89f
https://doi.org/10.2494/photopolymer.10.521 -
6
المؤلفون: Hyun-Jin Kim, Jae-Woo Lee, Yool Kang, Jae-Hyun Kim, Deog-Bae Kim, Jung-Yeol Lee, Geun-Jong Yu, Sang-Jeoung Kim
المصدر: SPIE Proceedings.
مصطلحات موضوعية: chemistry.chemical_classification, Acrylate, Materials science, business.industry, Extreme ultraviolet lithography, Nanotechnology, Polymer, Activation energy, Surface finish, law.invention, chemistry.chemical_compound, chemistry, Resist, law, Optoelectronics, Photolithography, business, Lithography
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::c0c375e968642a028e0ca48c0c74f0e3
https://doi.org/10.1117/12.711951 -
7
المؤلفون: Han-Ku Cho, Man-Hyoung Ryoo, Shi-Yong Lee, Yool Kang, Hyung-Rae Lee, Sang-Gyun Woo, Jin Hong, Joo-Tae Moon
المصدر: SPIE Proceedings.
مصطلحات موضوعية: Scanner, Materials science, business.industry, Nanotechnology, law.invention, Resist, Etching (microfabrication), law, Optoelectronics, Node (circuits), Dry etching, Photomask, Photolithography, business, Lithography
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::3a9e1cc5a3638a6eb5550a1c703835c5
https://doi.org/10.1117/12.599484 -
8
المؤلفون: Jung-Hyeon Lee, Gi-Sung Yeo, Sung-Woo Lee, Yool Kang, Soo-Han Choi, Young-Mi Lee, Han-Ku Cho, Woo-Sung Han, Chang-min Park, Sang-Wook Kim
المصدر: SPIE Proceedings.
مصطلحات موضوعية: Engineering, Optical proximity correction, Modelling methods, business.industry, Contact layer, Topology, business, Merge (version control), Simulation
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::003b579c1330a7dfce0999e23b7a8f55
https://doi.org/10.1117/12.536268 -
9
المؤلفون: Ju-Hyung Lee, Sang-Gyun Woo, Han-Ku Cho, Woo-Sung Han, Yun-Sook Chae, Yool Kang, Hyun-woo Kim
المصدر: Advances in Resist Technology and Processing XX.
مصطلحات موضوعية: Vacuum ultraviolet, Materials science, Resist, Thermal curing, UV curing, Dry etching, Composite material, Ultraviolet radiation, Lithography, Curing (chemistry)
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::aaf41312c64783f84526f19a25034174
https://doi.org/10.1117/12.485119 -
10
المؤلفون: Jeong-Hee Chung, Joo-Tae Moon, Sang-Jun Choi, Sang-Gyun Woo, Yool Kang
المصدر: Digest of Papers Microprocesses and Nanotechnology 2000. 2000 International Microprocesses and Nanotechnology Conference (IEEE Cat. No.00EX387).
مصطلحات موضوعية: chemistry.chemical_classification, chemistry.chemical_compound, Fabrication, Materials science, Resist, chemistry, Thermal, Nanotechnology, Wafer, Polymer, Silicon oxide, Critical dimension, Styrene
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::6b315c229dad917df09109076bc71a7c
https://doi.org/10.1109/imnc.2000.872640