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1Planned Maintenance Schedule Update Method for Predictive Maintenance of Semiconductor Plasma Etcher
المؤلفون: Kenji Tamaki, Shota Umeda, Masahiro Sumiya, Yoshito Kamaji
المصدر: IEEE Transactions on Semiconductor Manufacturing. 34:296-300
مصطلحات موضوعية: 0209 industrial biotechnology, Schedule, Planned maintenance, Computer science, Probabilistic logic, 02 engineering and technology, Condensed Matter Physics, Maintenance engineering, Predictive maintenance, Industrial and Manufacturing Engineering, Reliability engineering, Electronic, Optical and Magnetic Materials, 020901 industrial engineering & automation, Semiconductor plasma, Component (UML), Statistical analysis, Electrical and Electronic Engineering
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2
المؤلفون: Laura Pahren, Jay Lee, Yoshito Kamaji, Pin Li, Masahiro Sumiya, Masaki Ishiguro, Xiaodong Jia
المصدر: IEEE Transactions on Semiconductor Manufacturing. 32:183-189
مصطلحات موضوعية: 0209 industrial biotechnology, Contamination control, Materials science, Semiconductor device fabrication, 02 engineering and technology, Condensed Matter Physics, Industrial and Manufacturing Engineering, Predictive maintenance, Electronic, Optical and Magnetic Materials, Metrology, 020901 industrial engineering & automation, Etching (microfabrication), Virtual metrology, Wafer, Dry etching, Electrical and Electronic Engineering, Biological system
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3
المؤلفون: Daisuke Ogawa, Mitsuhiro Omura, Taku Iwase, Haruka Suzuki, Shota Nunomura, Yasushi Sonoda, Kazuo Takahashi, Nobuyuki Kuboi, Takayoshi Tsutsumi, Kenji Ishikawa, Yoshito Kamaji, Tomohiro Nozaki, Kenichi Yoshikawa, Tetsuji Shimizu, Kazunori Shinoda, Nobuyuki Negishi, Tatsuo Ishijima, Song-Yun Kang, Moritaka Nakamura, Kazunori Koga
المصدر: Japanese Journal of Applied Physics. 58:SE0802
مصطلحات موضوعية: Materials science, Fabrication, Physics and Astronomy (miscellaneous), Feature (computer vision), General Engineering, General Physics and Astronomy, Nanotechnology, Nanoscopic scale
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4
المؤلفون: Moritaka Nakamura, Kazunori Koga, Kazunori Shinoda, Shota Nunomura, Yoshito Kamaji, Yasushi Sonoda, Kazuo Takahashi, Kenichi Yoshikawa, Tomohiro Nozaki, Song-Yun Kang, Kenji Ishikawa, Daisuke Ogawa, Takayoshi Tsutsumi, Nobuyuki Kuboi, Tatsuo Ishijima, Tetsuji Shimizu, Taku Iwase, Haruka Suzuki, Mitsuhiro Omura, Nobuyuki Negishi
المصدر: Japanese Journal of Applied Physics. 58:SE0803
مصطلحات موضوعية: Process management, Physics and Astronomy (miscellaneous), Multidisciplinary approach, General Engineering, General Physics and Astronomy
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5
المؤلفون: Daisuke Ogawa, Tomohiro Nozaki, Tatsuo Ishijima, Moritaka Nakamura, Kazunori Koga, Kazunori Shinoda, Song-Yun Kang, Taku Iwase, Haruka Suzuki, Kazuo Takahashi, Nobuyuki Negishi, Takayoshi Tsutsumi, Nobuyuki Kuboi, Shota Nunomura, Kenichi Yoshikawa, Kenji Ishikawa, Mitsuhiro Omura, Yoshito Kamaji, Tetsuji Shimizu, Yasushi Sonoda
المصدر: Japanese Journal of Applied Physics. 58:SE0804
مصطلحات موضوعية: Leading edge, Materials science, Physics and Astronomy (miscellaneous), General Engineering, General Physics and Astronomy, Manufacturing engineering, Virtual product development
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6
المؤلفون: Takafumi Iguchi, Tetsuo Harada, Takeo Watanabe, Takashi Sugiyama, Kei Takase, Toshiyuki Uno, Hiroo Kinoshita, Yoshito Kamaji
المصدر: SPIE Proceedings.
مصطلحات موضوعية: Materials science, Microscope, business.industry, Extreme ultraviolet lithography, Mask inspection, law.invention, Optics, law, Extreme ultraviolet, Ultra low expansion glass, Optoelectronics, Photolithography, business, Critical dimension, Lithography
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::f9ab944eb195b4ed3136f41194f40c1d
https://doi.org/10.1117/12.824333 -
7
المؤلفون: Yoshito Kamaji, Hiroo Kinoshita, Kei Takase, Toshiyuki Uno, Takeo Watanabe
المصدر: Japanese Journal of Applied Physics. 49:126502
مصطلحات موضوعية: Microscope, Materials science, business.industry, Extreme ultraviolet lithography, General Engineering, Phase (waves), General Physics and Astronomy, Substrate (electronics), law.invention, Optics, law, Extreme ultraviolet, Optoelectronics, business, Critical dimension, Deposition (law)
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8
المؤلفون: Tetsuo Harada, Takafumi Iguchi, Takeo Watanabe, Kei Takase, Naoki Sakagami, Masaki Tada, Hiroo Kinoshita, Yasuyuki Fukushima, Yamaguchi Yuya, Yoshito Kamaji
المصدر: Japanese Journal of Applied Physics. 49:06GD07
مصطلحات موضوعية: Wavefront, Microscope, Materials science, business.industry, Extreme ultraviolet lithography, General Engineering, General Physics and Astronomy, Mask inspection, Substrate (electronics), law.invention, Optics, law, Extreme ultraviolet, Optoelectronics, Charge-coupled device, Wafer, business
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9
المؤلفون: Masaki Tada, Naoki Sakagami, Yasuyuki Fukushima, Yoshito Kamaji, Hiroo Kinoshita, Teruhiko Kimura, Tetsuo Harada, Takeo Watanabe, Takafumi Iguchi, Yamaguchi Yuya
المصدر: Japanese Journal of Applied Physics. 49:06GD06
مصطلحات موضوعية: Fabrication, Materials science, business.industry, General Engineering, General Physics and Astronomy, Grating, Undulator, Interference lithography, Optics, Resist, Extreme ultraviolet, Double-slit experiment, Optoelectronics, business, Diffraction grating
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10
المؤلفون: Takahiro Yoshizumi, Toshiyuki Uno, Hiroo Kinoshita, Takashi Sugiyama, Kei Takase, Takeo Watanabe, Yoshito Kamaji
المصدر: Japanese Journal of Applied Physics. 48:06FA07
مصطلحات موضوعية: Materials science, Microscope, Physics and Astronomy (miscellaneous), business.industry, Extreme ultraviolet lithography, General Engineering, Phase (waves), General Physics and Astronomy, Mask inspection, law.invention, Optics, law, Extreme ultraviolet, Microscopy, Optoelectronics, business