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المؤلفون: Toru Hirayama, Yujiro Hikida, Yusaku Uehara, Hirotaka Kono, Yuichi Shibazaki, Satoshi Ishiyama, Yosuke Shirata, Takayuki Funatsu, Akira Hayakawa
المصدر: SPIE Proceedings.
مصطلحات موضوعية: Scanner, Computer science, Semiconductor device fabrication, business.industry, Multiple patterning, business, Application software, computer.software_genre, computer, Simulation, Computer hardware, Immersion lithography
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::afbcbb50295fe215f40cd3dc49e33d40
https://doi.org/10.1117/12.2085735 -
2
المؤلفون: Yosuke Shirata, Motokatsu Imai, Hiroyuki Egashira, Takao Tsuzuki, Tomoyuki Matsuyama, Reiji Kanaya, Tsuyoshi Suzuki
المصدر: 2015 China Semiconductor Technology International Conference.
مصطلحات موضوعية: Engineering, Scanner, Optics, business.industry, Reticle, Calibration, Wafer, Node (circuits), Overlay, business, Productivity, Encoder
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::8dcf527d2f5c7cdedd043a3b4099b2a3
https://doi.org/10.1109/cstic.2015.7153350 -
3
المؤلفون: Jun Ishikawa, Yuichi Shibazaki, Yosuke Shirata, Masanori Ohba, Takayuki Funatsu, Hiroyuki Egashira, Yusaku Uehara
المصدر: SPIE Proceedings.
مصطلحات موضوعية: Computer science, business.industry, Distortion (optics), ComputingMethodologies_IMAGEPROCESSINGANDCOMPUTERVISION, law.invention, Lens (optics), Optics, law, Distortion, Reticle, Multiple patterning, business, Immersion lithography, Petzval field curvature
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::1b5c08fefd7f303562a93c2c2e8775c6
https://doi.org/10.1117/12.2046238 -
4
المصدر: SPIE Proceedings.
مصطلحات موضوعية: Autofocus, Scanner, Computer science, business.industry, law.invention, Lens (optics), law, Computer graphics (images), Immersion (virtual reality), Miniaturization, Wafer, business, Lithography, Immersion lithography, Computer hardware
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::6764baa94c85bfec388532397e4fa262
https://doi.org/10.1117/12.2011123 -
5
المؤلفون: Chihaya Motoyoshi, Katsushi Makino, Yuji Shiba, Hajime Yamamoto, Yuuki Ishii, Yasuhiro Morita, Jin Udagawa, Takahisa Kikuchi, Yosuke Shirata
المصدر: SPIE Proceedings.
مصطلحات موضوعية: Scanner, Semiconductor device fabrication, business.industry, Computer science, Node (networking), Immersion (virtual reality), Multiple patterning, Optoelectronics, Overlay, business, Telecommunications, Lithography
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::563463dc245a1d8201ca7054bdfd62fc
https://doi.org/10.1117/12.916246 -
6
المؤلفون: Yuuji Shiba, Shinji Wakamoto, Masahiko Yasuda, Yosuke Shirata, Takahisa Kikuchi, Shinya Takubo, Yuuki Ishii, Hiroto Imagawa
المصدر: SPIE Proceedings.
مصطلحات موضوعية: Interferometry, Scanner, Computer science, business.industry, Calibration, Astronomical interferometer, Multiple patterning, Overlay, business, Throughput (business), Encoder, Computer hardware, Metrology
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::46a7b8809f9d21b26f3941cb7ed42072
https://doi.org/10.1117/12.879291 -
7
المؤلفون: Yosuke Shirata, Yuho Kanaya, Yuuki Ishii, Hisashi Nishinaga, Noriaki Kasai, Junichi Kosugi, Kenichi Shiraishi, Shinji Wakamoto
المصدر: SPIE Proceedings.
مصطلحات موضوعية: Scanner, Materials science, business.industry, Overlay, Metrology, law.invention, Optical path, Optics, law, Multiple patterning, Photolithography, Focus (optics), business, Encoder
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::87294f1b029f6362fc1e48c1984f0b4d
https://doi.org/10.1117/12.846341 -
8
المؤلفون: Yuuki Ishii, Ryo Tanaka, Andrew J. Hazelton, Masahiko Yasuda, Takahisa Kikuchi, Yosuke Shirata, Kengo Takemasa, Yasuhiro Iriuchijima
المصدر: SPIE Proceedings.
مصطلحات موضوعية: Scanner, Materials science, business.industry, Overlay, law.invention, Optics, law, Multiple patterning, Node (circuits), Photolithography, business, Lithography, Immersion lithography, Next-generation lithography
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::9ca6149960300f71a4c88a2c4cd5fe41
https://doi.org/10.1117/12.846486