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المؤلفون: Masahiro Yoshida, Wei-Hung Wang, C.H. Huang, Elvis Yang, T.H. Yang, K.C. Chen, Yosuke Takarada, Yoshiki Sakamoto, Shinichi Egashira, Ken Otani, Tsukasa Saito, Shoshi Katayama, Seiya Miura, Starley Douglas Shelton
المصدر: Metrology, Inspection, and Process Control XXXVI.
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::8b9d26b51fdcfc35105bd23227efd54b
https://doi.org/10.1117/12.2611020 -
2Lithography tool improvement at productivity and performance with data analysis and machine learning
المصدر: Photomask Technology 2021.
مصطلحات موضوعية: Fault tree analysis, Downtime, Artificial Intelligence System, Computer science, Semiconductor device fabrication, business.industry, Stability (learning theory), Overlay, Machine learning, computer.software_genre, Virtual metrology, Artificial intelligence, business, computer, Lithography
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::b5c7355db3aa972e6e4966b3aba3b03e
https://doi.org/10.1117/12.2597215 -
3Lithography tool improvement at productivity and performance with data analysis and machine learning
المؤلفون: Yosuke TAKARADA, Douglas Shelton, Tsuneari Fukada, Shosi Katayama, Ken-Ichiro Mori, Seiya Miura
المصدر: Optical Microlithography XXXIV.
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::78d85f85eaccc53387acdc1061a0787b
https://doi.org/10.1117/12.2583784 -
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المؤلفون: Tsuneari Fukada, Ryo Kasai, Takahiro Takiguchi, Yosuke Takarada, Kenta Kita, Satoru Sugiyama
المصدر: 2019 China Semiconductor Technology International Conference (CSTIC).
مصطلحات موضوعية: Downtime, Computer science, Volume (computing), Production (economics), Monitoring system, Maximization, Minification, Productivity, Reliability engineering
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::45726ce09812ca00bea885c0672ffee3
https://doi.org/10.1109/cstic.2019.8755755