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1
المؤلفون: Wei Liu, Christopher Lazik, C. R. Brundle, Yuri Uritsky, Malcolm J. Bevan, Paul F. Ma, Tang Wei, Bobek Sarah Michelle, Kulshreshtha Prashant Kumar, Venkatasubramanian Eswaranand, Ghazal Saheli
المصدر: Journal of Electron Spectroscopy and Related Phenomena. 231:57-67
مصطلحات موضوعية: Radiation, 010304 chemical physics, business.industry, NAND gate, 02 engineering and technology, 021001 nanoscience & nanotechnology, Condensed Matter Physics, 01 natural sciences, Atomic and Molecular Physics, and Optics, Electronic, Optical and Magnetic Materials, Characterization (materials science), Amorphous solid, Flash (photography), X-ray photoelectron spectroscopy, 0103 physical sciences, Optoelectronics, Wafer, Physical and Theoretical Chemistry, 0210 nano-technology, business, Spectroscopy, Dram, High-κ dielectric
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2
المؤلفون: Yuri Uritsky, Alberto Herrera-Gomez, A. Sanchez-Martinez, Milton Vázquez-Lepe, P.G. Mani-Gonzalez, Francisco S. Aguirre-Tostado, O. Ceballos-Sanchez, Robert M. Wallace, G. Conti
المصدر: Journal of Electron Spectroscopy and Related Phenomena. 184:487-500
مصطلحات موضوعية: Radiation, Spectrometer, business.industry, Chemistry, Substrate (electronics), Condensed Matter Physics, Electron spectroscopy, Atomic and Molecular Physics, and Optics, Electronic, Optical and Magnetic Materials, Characterization (materials science), Optics, X-ray photoelectron spectroscopy, Measuring instrument, Physical and Theoretical Chemistry, Spectroscopy, business, Beam (structure)
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3
المؤلفون: Biao Liu, Po-Fu Huang, Charles C. Wang, Yuri Uritsky
المصدر: Scanning Microscopy 2010.
مصطلحات موضوعية: Amplitude modulation, Optics, Data acquisition, Materials science, Cantilever, business.industry, Nano, Calibration, Phase (waves), business, Light scattering, Characterization (materials science)
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::36b69f97da53c3bb225a578245ead23b
https://doi.org/10.1117/12.853948 -
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المؤلفون: Yuri Uritsky, Chris Ngai, Chorng-Ping Chang, Motoya Okazaki, Yufei Chen, Mani Thothadri, Paul V. Miller, Manjari Dutta, Deenesh Padhi, Wendy H. Yeh, Raymond Maas, Chris Lazik, Sen-Hou Ko, Stephan Sinkwitz, Martin Jay Seamons, Abraham Anapolsky
المصدر: SPIE Proceedings.
مصطلحات موضوعية: Materials science, business.industry, Polishing, ComputerApplications_COMPUTERSINOTHERSYSTEMS, Nanotechnology, Hardware_PERFORMANCEANDRELIABILITY, Edge (geometry), Wafer backgrinding, law.invention, law, Hardware_INTEGRATEDCIRCUITS, Optoelectronics, Wafer, Photolithography, business, Front end of line, Lithography, Immersion lithography
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::98dca7331dce13eb97c78ea980795e05
https://doi.org/10.1117/12.773113 -
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المؤلفون: Christopher Lazik, G. Conti, Yuri Uritsky
المصدر: Microscopy and Microanalysis. 13
مصطلحات موضوعية: chemistry, X-ray photoelectron spectroscopy, Content distribution, Analytical chemistry, chemistry.chemical_element, Dielectric, Instrumentation, Nitrogen, Transmission electron spectroscopy, Characterization (materials science)
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6
المؤلفون: Yuri Uritsky, Abraham Anapolsky
المصدر: Microscopy and Microanalysis. 11
مصطلحات موضوعية: Materials science, business.industry, Optoelectronics, business, Root cause analysis, Instrumentation, Auger
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7
المؤلفون: Christopher Lazik, G. Conti, Yuri Uritsky
المصدر: Microscopy and Microanalysis. 11
مصطلحات موضوعية: Nickel silicide, Materials science, Chemical engineering, Micro raman, Thermal stability, Thin film, Instrumentation, Phase formation, Characterization (materials science)
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8
المؤلفون: Charles C. Wang, Pu Ye, Fu Li, Yi Ma, Yuri Uritsky
المصدر: AIP Conference Proceedings.
مصطلحات موضوعية: Yield (engineering), Morphology (linguistics), Materials science, business.industry, Surface roughness, Optoelectronics, Nanotechnology, Wafer, Surface finish, Sensitivity (control systems), Thin film, business, Characterization (materials science)
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9
المؤلفون: Yuri Uritsky, G. Conti, Charles C. Wang, P. Mack, J. Wolstenholme, S. Hung, M. Foad, C. R. Brundle, H. Graoui
المصدر: AIP Conference Proceedings.
مصطلحات موضوعية: Silicon oxynitride, business.industry, Annealing (metallurgy), Analytical chemistry, Nitride, Electron spectroscopy, Chemical state, chemistry.chemical_compound, chemistry, X-ray photoelectron spectroscopy, Optoelectronics, Thin film, business, Spectroscopy
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10
المؤلفون: Charles C. Wang, Yuri Uritsky, Gigi Lai, C. R. Brundle
المصدر: AIP Conference Proceedings.
مصطلحات موضوعية: Crystal, Barrier layer, Crystallography, education.field_of_study, Materials science, Diffusion barrier, Population, Surface roughness, Surface finish, Composite material, Thin film, Microstructure, education