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المؤلفون: Bassam Shamoun, Zachary Alberti, Igal Bucay, S. Ellis, Michael Erickson, B. Liu, Mahesh Chandramouli, Andrew T. Sowers, Frank E. Abboud, G. Hochleitner, M. Tomandl, C. Klein, E. Platzgummer
المصدر: Novel Patterning Technologies 2023.
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::e1dda979ac545253e975cc2ee96dedd9
https://doi.org/10.1117/12.2657746 -
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المؤلفون: Mahesh Chandramouli, Bin Liu, Zachary Alberti, Frank E. Abboud, Gottfried Hochleitner, Witold Wroczewski, Stefan Kuhn, Christof Klein, Elmar Platzgummer
المصدر: Photomask Technology 2022.
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::c5cbdbbb04785aed5778db289c18976d
https://doi.org/10.1117/12.2645895