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المؤلفون: Oleg J. Yas' ko, A. M. Esipchuk, Zhou Quing, D. C. Schram
المصدر: Proceeding of Progress in Plasma Processing of Materials 1997.
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::b9809e700115a366092dc4453d489c8f
https://doi.org/10.1615/itppc-1996.170