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1دورية أكاديمية
المؤلفون: Zifeng Zhao, Zhenyu Zhang, Chunjing Shi, Junyuan Feng, Xuye Zhuang, Li Li, Fanning Meng, Haodong Li, Zihang Xue, Dongdong Liu
المصدر: Materials, Vol 16, Iss 3, p 1148 (2023)
مصطلحات موضوعية: quartz glass, chemical mechanical polishing, CeO2 composite abrasive, environment friendly, Technology, Electrical engineering. Electronics. Nuclear engineering, TK1-9971, Engineering (General). Civil engineering (General), TA1-2040, Microscopy, QH201-278.5, Descriptive and experimental mechanics, QC120-168.85
وصف الملف: electronic resource