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المؤلفون: Zvi Veig, Shmuel Feldman, Avi Karsenty, Yoel Arieli
المصدر: International Journal of Measurement Technologies and Instrumentation Engineering. 6:33-45
مصطلحات موضوعية: Software, Materials science, Optics, Spots, Ccd camera, Ellipsometry, business.industry, Full field, business
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::b8deb5a927184c491b6b92fbab75c8d9
https://doi.org/10.4018/ijmtie.2017010104