يعرض 1 - 10 نتائج من 473 نتيجة بحث عن '"cluster tools"', وقت الاستعلام: 0.88s تنقيح النتائج
  1. 1
    دورية أكاديمية
    Scheduling a Single-ARM Multi-Cluster Tool with a Condition-Based Cleaning Operation

    المؤلفون: Zhu, Qinghua, Li, Hongpeng, Wang, Cong, Hou, Yan

    المصدر: IEEE/CAA Journal of Automatica Sinica IEEE/CAA J. Autom. Sinica Automatica Sinica, IEEE/CAA Journal of. 10(10):1965-1983 Oct, 2023

    Full Text Finder
    أضف إلى المفضلة
  2. 2
    مؤتمر
    The impact of data fragmentation on processing time modeling in semiconductor manufacturing : *Topic: IE: Industrial Engineering

    المؤلفون: Borodin, Valeria, Chembu, Narendiran Gopinathan, Khemiri, Abdelhak, Heugten, Jasper van, Yugma, Claude

    المصدر: 2023 34th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) SEMI Advanced Semiconductor Manufacturing Conference (ASMC), 2023 34th Annual. :1-6 May, 2023

    Relation: 2023 34th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC)

    Full Text Finder
    أضف إلى المفضلة
  3. 3
    دورية أكاديمية
    An Efficient Scheduling Method for Single-Arm Cluster Tools With Multifunctional Process Modules

    المؤلفون: Xiong, W., Li, J., Qiao, Y., Bai, L., Huang, B., Wu, N.

    المصدر: IEEE Transactions on Systems, Man, and Cybernetics: Systems IEEE Trans. Syst. Man Cybern, Syst. Systems, Man, and Cybernetics: Systems, IEEE Transactions on. 53(6):3270-3283 Jun, 2023

    Full Text Finder
    أضف إلى المفضلة
  4. 4
    مؤتمر
    Scheduling single-arm cluster tools with emergency order insertion

    المؤلفون: Li, JinCheng, Pan, ChunRong, Liu, ZhengChao, Lai, YiMing

    المصدر: 2022 IEEE International Conference on Networking, Sensing and Control (ICNSC) Networking, Sensing and Control (ICNSC), 2022 IEEE International Conference on. :1-6 Dec, 2022

    Relation: 2022 IEEE International Conference on Networking, Sensing and Control (ICNSC)

    أضف إلى المفضلة
  5. 5
    دورية أكاديمية
    Influence of Dynamic Accuracy Constraints of Manipulator of Wafer Transmission Robot on Scheduling and Control of Single-Armed Cluster Tools

    المؤلفون: Li, T., Zheng, Z.

    المصدر: IEEE Access Access, IEEE. 11:7714-7726 2023

    Full Text Finder
    أضف إلى المفضلة
  6. 6
    مؤتمر
    A Virtual Wafer-based Scheduling Method for Dual-arm Cluster Tools with Chamber Cleaning Requirements

    المؤلفون: Qiao, Yan, Li, Jie, Lu, YanJun, Zhang, SiWei, Wu, NaiQi, Liu, Bin

    المصدر: 2021 IEEE International Conference on Networking, Sensing and Control (ICNSC) Networking, Sensing and Control (ICNSC), 2021 IEEE International Conference on. 1:1-6 Dec, 2021

    Relation: 2021 IEEE International Conference on Networking, Sensing and Control (ICNSC)

    أضف إلى المفضلة
  7. 7
    دورية أكاديمية
    An Efficient Binary Integer Programming Model for Residency Time-Constrained Cluster Tools With Chamber Cleaning Requirements

    المؤلفون: Qiao, Y., Lu, Y., Li, J., Zhang, S., Wu, N., Liu, B.

    المصدر: IEEE Transactions on Automation Science and Engineering IEEE Trans. Automat. Sci. Eng. Automation Science and Engineering, IEEE Transactions on. 19(3):1757-1771 Jul, 2022

    Full Text Finder
    أضف إلى المفضلة
  8. 8
    مؤتمر
    Noncyclic Scheduling of Multi-cluster Tools with Multi-type Wafers Based on Pareto Optimization

    المؤلفون: Yan, Yuanyuan, Tao, Qinghua, Wang, Huangang, Fan, Wenhui

    المصدر: 2021 13th International Conference on Computer and Automation Engineering (ICCAE) Computer and Automation Engineering (ICCAE), 2021 13th International Conference on. :95-99 Mar, 2021

    Relation: 2021 13th International Conference on Computer and Automation Engineering (ICCAE)

    أضف إلى المفضلة
  9. 9
    دورية أكاديمية
    Closing-Down Optimization for Single-Arm Cluster Tools Subject to Wafer Residency Time Constraints

    المؤلفون: Qiao, Y., Zhou, M., Wu, N., Li, Z., Zhu, Q.

    المصدر: IEEE Transactions on Systems, Man, and Cybernetics: Systems IEEE Trans. Syst. Man Cybern, Syst. Systems, Man, and Cybernetics: Systems, IEEE Transactions on. 51(11):6792-6807 Nov, 2021

    Full Text Finder
    أضف إلى المفضلة
  10. 10
    دورية أكاديمية
    Reducing Wafer Delay Time by Robot Idle Time Regulation for Single-Arm Cluster Tools

    المؤلفون: Xiong, W., Pan, C., Qiao, Y., Wu, N., Chen, M., Hsieh, P.

    المصدر: IEEE Transactions on Automation Science and Engineering IEEE Trans. Automat. Sci. Eng. Automation Science and Engineering, IEEE Transactions on. 18(4):1653-1667 Oct, 2021

    Full Text Finder
    أضف إلى المفضلة
أدوات البحث: أحصل على تغذية RSS – أرسل هذا البحث بالبريد الإلكتروني – حفظ البحث – جدول التنبيهات: لا شيء