يعرض 1 - 10 نتائج من 86 نتيجة بحث عن '"in-situ cleaning"', وقت الاستعلام: 1.25s تنقيح النتائج
  1. 1
    مؤتمر
    Reducing CFx residue from Etching Process by Optimizing Post Plamsa Treatment

    المؤلفون: Yang, Ki Dong, Yang, Heeseong, Han, Eunyoung, Kim, Youngeun, Han, Taehee, Kim, Young Jeong, Lim, Nuri, Lim, Jungyup, Kim, Joong Jung

    المصدر: 2023 34th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) SEMI Advanced Semiconductor Manufacturing Conference (ASMC), 2023 34th Annual. :1-5 May, 2023

    Relation: 2023 34th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC)

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  2. 2
    مؤتمر
    In-situ Cleaning of Post-etch Byproducts by Manipulating Dechucking Environment Gas in Silicon Etch Process

    المؤلفون: Yang, Ki Dong, Park, Hanbit, Lee, Joonho H., Hwang, Eunji, Jeong, Jiwoo, Kwon, Sangku, Kim, Kihyun, Jeong, Jaein, Han, Eunyoung, Kim, Young Jeong, Kim, Joong Jung

    المصدر: 2022 33rd Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) SEMI Advanced Semiconductor Manufacturing Conference (ASMC), 2022 33rd Annual. :1-4 May, 2022

    Relation: 2022 33rd Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC)

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  3. 3
    مؤتمر
    Formation and Removal of Tungsten Flake and Metallic Film Defects in Tungsten Contact CMP

    المؤلفون: Egan, Bryan, Kim, Hong Jin, Solan, Robert

    المصدر: 2020 31st Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) SEMI Advanced Semiconductor Manufacturing Conference (ASMC), 2020 31st Annual. :1-4 Aug, 2020

    Relation: 2020 31st Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC)

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  4. 4
    دورية أكاديمية
    In-Situ H2O2 Cleaning for Fouling Control of Manganese-Doped Ceramic Membrane through Confined Catalytic Oxidation Inside Membrane

    المؤلفون: Tang, Shengyin, Fu, Wanyi, Song, Tiantian, Tang, Tianhao, Chen, Li, Guo, Jianning, Hermanowicz, Slav W, Zhang, Xihui

    المصدر: Membranes. 12(1)

    مصطلحات موضوعية: Chemical Engineering, Engineering, Environmental Engineering, manganese-doped ceramic membrane, fouling mitigation, in-situ cleaning, hydrogen peroxide, confined catalytic oxidation, wastewater treatment, Civil Engineering, Chemical engineering, Environmental engineering

    وصف الملف: application/pdf

    URL الوصول: https://escholarship.org/uc/item/82q7k651

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  5. 5
    مؤتمر
    Effect of friction on CMP in-situ brush cleaning: CFM: Contamination free manufacturing

    المؤلفون: Kim, Hong Jin, Lee, Tae Hoon, Govindarajulu, Venugopal

    المصدر: 2017 28th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) Advanced Semiconductor Manufacturing Conference (ASMC), 2017 28th Annual SEMI. :113-116 May, 2017

    Relation: 2017 28th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC)

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  6. 6
    دورية أكاديمية

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  7. 7
    مؤتمر
    The N2 diluted Application in PECVD NF3 in-situ chamber cleaning for PFC reduction

    المؤلفون: Chen, M. H., Ni, C. T., Su, C. H., Chen, Y. L.

    المصدر: ASMC 2013 SEMI Advanced Semiconductor Manufacturing Conference Advanced Semiconductor Manufacturing Conference (ASMC), 2013 24th Annual SEMI. :163-165 May, 2013

    Relation: 2013 24th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC)

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  8. 8
    دورية أكاديمية
    In situ cleaning effect on the electrical properties of Ge MOS devices by Ar gas anneal

    المؤلفون: Weiping Bai, Nan Lu, Ritenour, A.P., Lee, M.L., Antoniadis, D.A., Dim-Lee Kwong

    المصدر: IEEE Transactions on Electron Devices IEEE Trans. Electron Devices Electron Devices, IEEE Transactions on. 53(10):2661-2664 Oct, 2006

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  9. 9
    دورية أكاديمية
    In-Situ H2O2 Cleaning for Fouling Control of Manganese-Doped Ceramic Membrane through Confined Catalytic Oxidation Inside Membrane

    المؤلفون: Shengyin Tang, Wanyi Fu, Tiantian Song, Tianhao Tang, Li Chen, Jianning Guo, Slav W. Hermanowicz, Xihui Zhang

    المصدر: Membranes, Vol 12, Iss 1, p 21 (2021)

    مصطلحات موضوعية: manganese-doped ceramic membrane, fouling mitigation, in-situ cleaning, hydrogen peroxide, confined catalytic oxidation, wastewater treatment, Chemical technology, TP1-1185, Chemical engineering, TP155-156

    وصف الملف: electronic resource

    Relation: https://www.mdpi.com/2077-0375/12/1/21; https://doaj.org/toc/2077-0375

    URL الوصول: https://doaj.org/article/01bbc4bd6fdc494fbb691d4d0265c2fe

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  10. 10
    دورية أكاديمية

    لا يتم عرض هذه النتيجة على الضيوف.

    View this record from ISI Web of Science
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