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1مؤتمر
المؤلفون: Hazra, Sougata, Piazza, Alisha, Jung, Ki Wook, Asheghi, Mehdi, Gupta, Man Prakash, Jih, Edward, Degner, Mike, Goodson, Kenneth E.
المصدر: 2020 19th IEEE Intersociety Conference on Thermal and Thermomechanical Phenomena in Electronic Systems (ITherm) Thermal and Thermomechanical Phenomena in Electronic Systems (ITherm), 2020 19th IEEE Intersociety Conference on. :83-90 Jul, 2020
Relation: 2020 19th IEEE Intersociety Conference on Thermal and Thermomechanical Phenomena in Electronic Systems (ITherm)
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2مؤتمر
المؤلفون: Xing, Y., Gosalvez, M. A., Sato, K.
المصدر: TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference Solid-State Sensors, Actuators and Microsystems Conference, 2009. TRANSDUCERS 2009. International. :747-750 Jun, 2009
Relation: TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference
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3دورية أكاديمية
المؤلفون: Julia Heupel, Maximilian Pallmann, Jonathan Körber, Rolf Merz, Michael Kopnarski, Rainer Stöhr, Johann Peter Reithmaier, David Hunger, Cyril Popov
المصدر: Micromachines, Vol 11, Iss 12, p 1080 (2020)
مصطلحات موضوعية: single-crystal diamond, membranes, fiber-based microcavity, nanophotonics, micromasking, roughness reduction, Mechanical engineering and machinery, TJ1-1570
وصف الملف: electronic resource
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4
المؤلفون: Emeline Baudet, Christophe Cardinaud, Guillaume Le Dain, Virginie Nazabal, Thibaut Meyer, Ahmed Rhallabi, Aurélie Girard, Petr Němec
المساهمون: Institut des Matériaux Jean Rouxel (IMN), Université de Nantes - UFR des Sciences et des Techniques (UN UFR ST), Université de Nantes (UN)-Université de Nantes (UN)-Centre National de la Recherche Scientifique (CNRS)-Institut de Chimie du CNRS (INC)-Ecole Polytechnique de l'Université de Nantes (EPUN), Université de Nantes (UN)-Université de Nantes (UN), Institut des Sciences Chimiques de Rennes (ISCR), Centre National de la Recherche Scientifique (CNRS)-Institut de Chimie du CNRS (INC)-Université de Rennes 1 (UR1), Université de Rennes (UNIV-RENNES)-Université de Rennes (UNIV-RENNES)-Ecole Nationale Supérieure de Chimie de Rennes (ENSCR)-Institut National des Sciences Appliquées - Rennes (INSA Rennes), Institut National des Sciences Appliquées (INSA)-Université de Rennes (UNIV-RENNES)-Institut National des Sciences Appliquées (INSA), Department of Graphic Arts and Photophysics [University of Pardubice], Faculty of Chemical Technology [University of Pardubice], University of Pardubice-University of Pardubice, 19-24516S, Grantová Agentura České Republiky, Université de Nantes (UN)-Université de Nantes (UN)-Ecole Polytechnique de l'Université de Nantes (EPUN), Université de Nantes (UN)-Université de Nantes (UN)-Institut de Chimie du CNRS (INC)-Centre National de la Recherche Scientifique (CNRS), Université de Rennes (UR)-Institut National des Sciences Appliquées - Rennes (INSA Rennes), Institut National des Sciences Appliquées (INSA)-Institut National des Sciences Appliquées (INSA)-Ecole Nationale Supérieure de Chimie de Rennes (ENSCR)-Institut de Chimie du CNRS (INC)-Centre National de la Recherche Scientifique (CNRS)
المصدر: Applied Surface Science
Applied Surface Science, Elsevier, 2021, 549, pp.149192. ⟨10.1016/j.apsusc.2021.149192⟩
Applied Surface Science, 2021, 549, pp.149192. ⟨10.1016/j.apsusc.2021.149192⟩مصطلحات موضوعية: Materials science, Analytical chemistry, General Physics and Astronomy, chemistry.chemical_element, Ge-Sb-Se, 02 engineering and technology, Surface finish, SF 6, 010402 general chemistry, 01 natural sciences, 7. Clean energy, X-ray photoelectron spectroscopy, Physics::Plasma Physics, Etching (microfabrication), Physics::Atomic and Molecular Clusters, Physics::Chemical Physics, Thin film, Argon, ICP, Surfaces and Interfaces, General Chemistry, 021001 nanoscience & nanotechnology, Condensed Matter Physics, 0104 chemical sciences, Surfaces, Coatings and Films, Amorphous solid, chemistry, Etching, Fluorine, [PHYS.COND.CM-MS]Physics [physics]/Condensed Matter [cond-mat]/Materials Science [cond-mat.mtrl-sci], Inductively coupled plasma, 0210 nano-technology, Micromasking
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المؤلفون: Heupel, Julia, Pallmann, Maximilian, Körber, Jonathan, Merz, Rolf, Kopnarski, Michael, Stöhr, Rainer, Reithmaier, Johann Peter, Hunger, David, Popov, Cyril
المصدر: Micromachines
Volume 11
Issue 12
Micromachines, Vol 11, Iss 1080, p 1080 (2020)
Micromachines, 11 (12), Art.-Nr.: 1080مصطلحات موضوعية: roughness reduction, Einkristall, Hardware_MEMORYSTRUCTURES, micromasking, Physics, lcsh:Mechanical engineering and machinery, single-crystal diamond, Article, Membran, Rauigkeit, membranes, Mathematics::Metric Geometry, nanophotonics, ddc:530, lcsh:TJ1-1570, Nanophotonik, Diamant, fiber-based microcavity
وصف الملف: application/pdf
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المساهمون: Bagolini, A, Scauso, P, Sanguinetti, S, Bellutti, P
مصطلحات موضوعية: DRIE, Materials science, Polymers and Plastics, Silicon, chemistry.chemical_element, gra, Ion, Biomaterials, Aluminium, Etching (microfabrication), Deep reactive-ion etching, Thin film, FIS/03 - FISICA DELLA MATERIA, Microelectromechanical systems, micromasking, business.industry, aluminium, Metals and Alloys, hard mask, Surfaces, Coatings and Films, Electronic, Optical and Magnetic Materials, MEMS, chemistry, Optoelectronics, aspect ratio, business, Surface finishing
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::7f5d91bde4eb8f3299e18bdf966a8e73
http://hdl.handle.net/10281/263157 -
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8دورية أكاديمية
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9دورية أكاديمية
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10دورية أكاديمية
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