-
1مؤتمر
المؤلفون: Feng, Jinhua, Han, Tianhao, Dong, Biao, Wang, Yu, Zhou, Hongcheng, Yan, Zhongming
المصدر: 2022 International Applied Computational Electromagnetics Society Symposium (ACES-China) Applied Computational Electromagnetics Society Symposium (ACES-China), 2022 International. :1-2 Dec, 2022
Relation: 2022 International Applied Computational Electromagnetics Society Symposium (ACES-China)
-
2دورية أكاديميةIn Situ Synchrotron XRD Characterization of Piezoelectric Al1−xScxN Thin Films for MEMS Applications
المؤلفون: Wenzheng Jiang, Lei Zhu, Lingli Chen, Yumeng Yang, Xi Yu, Xiaolong Li, Zhiqiang Mu, Wenjie Yu
المصدر: Materials, Vol 16, Iss 5, p 1781 (2023)
مصطلحات موضوعية: aluminum scandium nitride, synchrotron XRD, piezoelectric coefficient, substrate clamping effect, micro-electromechanical system, Technology, Electrical engineering. Electronics. Nuclear engineering, TK1-9971, Engineering (General). Civil engineering (General), TA1-2040, Microscopy, QH201-278.5, Descriptive and experimental mechanics, QC120-168.85
وصف الملف: electronic resource
-
3دورية أكاديمية
لا يتم عرض هذه النتيجة على الضيوف.
تسجيل الدخول للوصول الكامل.