المؤلفون: Benk, Markus, Chao, Weilun, Miyakawa, Ryan, Goldberg, Kenneth, Naulleau, Patrick

مصطلحات موضوعية: Medical and Biological Physics, Physical Sciences, EUV, mask, photomask, microscope, aerial image, zoneplate, SHARP, Communications engineering, Electronics, sensors and digital hardware, Atomic, molecular and optical physics

وصف الملف: application/pdf

URL الوصول: https://escholarship.org/uc/item/9vh7g4rm
https://escholarship.org/content/qt9vh7g4rm/qt9vh7g4rm.pdf

المؤلفون: Benk, M, Chao, W, Miyakawa, R, Goldberg, K, Naulleau, P

مصطلحات موضوعية: EUV, mask, photomask, microscope, aerial image, zoneplate, SHARP

وصف الملف: application/pdf

URL الوصول: https://escholarship.org/uc/item/9vh7g4rm

المؤلفون: Tahara, Tatsuki, Akamatsu, Takanori, Arai, Yasuhiko, Shimobaba, Tomoyoshi, Ito, Tomoyoshi, Kakue, Takashi

مصطلحات موضوعية: Communications Engineering, Engineering, Fresnel zoneplate, Zoneplate pattern data preparation, X-ray, Extreme ultraviolet, Optical Physics, Electrical and Electronic Engineering, Communications Technologies, Optoelectronics & Photonics, Communications engineering, Atomic, molecular and optical physics, Quantum physics

URL الوصول: https://escholarship.org/uc/item/3j66d4z4

المؤلفون: Wang, Yow-Gwo, Miyakawa, Ryan H, Chao, Weilun, Naulleau, Patrick P

مصطلحات موضوعية: Fresnel zoneplate, Zoneplate pattern data preparation, X-ray, Extreme ultraviolet, Networking and Information Technology R&D, Optoelectronics & Photonics, Optical Physics, Electrical and Electronic Engineering, Communications Technologies

URL الوصول: https://escholarship.org/uc/item/3j66d4z4

المؤلفون: Wang, Yow-Gwo

مصطلحات موضوعية: Electrical engineering, Actinic Mask Inspection, Extreme Ultraviolet Lithography, Fresnel Zoneplate, Mask 3D Effects, Sub-resolution Assist Feature (SRAF)

وصف الملف: application/pdf

URL الوصول: https://escholarship.org/uc/item/3fb9j31f

المؤلفون: Wang, YG, Miyakawa, RH, Chao, W, Naulleau, PP

المصدر: Wang, Y-G; Miyakawa, RH; Chao, W; & Naulleau, PP. (2017). Efficient Fresnel zoneplate pattern data preparation for high-resolution nanofabrication. OPTICS COMMUNICATIONS, 402, 167-172. doi: 10.1016/j.optcom.2017.06.060. Lawrence Berkeley National Laboratory: Retrieved from: http://www.escholarship.org/uc/item/3j66d4z4
Wang, YG; Miyakawa, RH; Chao, W; & Naulleau, PP. (2017). Efficient Fresnel zoneplate pattern data preparation for high-resolution nanofabrication. Optics Communications, 402, 167-172. doi: 10.1016/j.optcom.2017.05.060. Lawrence Berkeley National Laboratory: Retrieved from: http://www.escholarship.org/uc/item/0vb7f27b

مصطلحات موضوعية: X-ray, Communications Technologies, Fresnel zoneplate, Extreme ultraviolet (EUV), ComputingMethodologies_IMAGEPROCESSINGANDCOMPUTERVISION, Zoneplate pattern data preparation, Optical Physics, Electrical and Electronic Engineering, Optoelectronics & Photonics

وصف الملف: application/pdf

URL الوصول: https://explore.openaire.eu/search/publication?articleId=dedup_wf_001::228b2303b5554cc561f62bd6c5bbcfdd
http://www.escholarship.org/uc/item/3j66d4z4

المؤلفون: Patrick P. Naulleau, Ryan Miyakawa, Ken Goldberg, Weilun Chao, Markus P. Benk

المساهمون: Goldberg, Kenneth A

المصدر: Extreme Ultraviolet (EUV) Lithography X.

مصطلحات موضوعية: SHARP, Physics, aerial image, Microscope, microscope, Stray light, business.industry, Aperture, Extreme ultraviolet lithography, photomask, law.invention, mask, Optics, law, Extreme ultraviolet, zoneplate, Reticle, EUV, Ray tracing (graphics), Photomask, business

وصف الملف: application/pdf

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::1f1bd55390314f062dfa78fe863317ea
https://doi.org/10.1117/12.2516387

لا يتم عرض هذه النتيجة على الضيوف.
تسجيل الدخول للوصول الكامل.

لا يتم عرض هذه النتيجة على الضيوف.
تسجيل الدخول للوصول الكامل.

المؤلفون: Oliveira, Peter William de

المساهمون: Schmidt, Helmut

مصطلحات موضوعية: Holographie, nanocomposite, Fresnel zoneplate, Nanokomposit, holography, ddc:620, Fresnel-Zonenplatte

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::cc91ee6939237eb13af85a81352bd250