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Micro-Raman Characterization of Structural Features of High-k Stack Layer of SOI Nanowire Chip, Designed to Detect Circular RNA Associated with the Development of Glioma.

التفاصيل البيبلوغرافية
العنوان: Micro-Raman Characterization of Structural Features of High-k Stack Layer of SOI Nanowire Chip, Designed to Detect Circular RNA Associated with the Development of Glioma.
المؤلفون: Ivanov YD; Laboratory of Nanobiotechnology, Institute of Biomedical Chemistry, 119121 Moscow, Russia., Malsagova KA; Laboratory of Nanobiotechnology, Institute of Biomedical Chemistry, 119121 Moscow, Russia., Popov VP; Rzhanov Institute of Semiconductor Physics, Siberian Branch of Russian Academy of Sciences, 630090 Novosibirsk, Russia., Kupriyanov IN; Laboratory of Experimental Mineralogy and Crystallogenesis, Sobolev Institute of Geology and Mineralogy, Siberian Branch of Russian Academy of Sciences, 630090 Novosibirsk, Russia., Pleshakova TO; Laboratory of Nanobiotechnology, Institute of Biomedical Chemistry, 119121 Moscow, Russia., Galiullin RA; Laboratory of Nanobiotechnology, Institute of Biomedical Chemistry, 119121 Moscow, Russia., Ziborov VS; Laboratory of Nanobiotechnology, Institute of Biomedical Chemistry, 119121 Moscow, Russia.; Joint Institute for High Temperatures of Russian Academy of Sciences, 125412 Moscow, Russia., Dolgoborodov AY; Joint Institute for High Temperatures of Russian Academy of Sciences, 125412 Moscow, Russia., Petrov OF; Joint Institute for High Temperatures of Russian Academy of Sciences, 125412 Moscow, Russia., Miakonkikh AV; K. A. Valiev Institute of Physics and Technology of the Russian Academy of Sciences, 117218 Moscow, Russia., Rudenko KV; K. A. Valiev Institute of Physics and Technology of the Russian Academy of Sciences, 117218 Moscow, Russia., Glukhov AV; JSC Novosibirsk Plant of Semiconductor Devices with OKB, 630082 Novosibirsk, Russia., Smirnov AY; Russian Union of Industrialists and Entrepreneurs, 109240 Moscow, Russia., Usachev DY; Federal State Autonomous Institution 'N. N. Burdenko National Medical Research Center of Neurosurgery' of the Ministry of Health of the Russian Federation, 125047 Moscow, Russia., Gadzhieva OA; Federal State Autonomous Institution 'N. N. Burdenko National Medical Research Center of Neurosurgery' of the Ministry of Health of the Russian Federation, 125047 Moscow, Russia., Bashiryan BA; Federal State Autonomous Institution 'N. N. Burdenko National Medical Research Center of Neurosurgery' of the Ministry of Health of the Russian Federation, 125047 Moscow, Russia., Shimansky VN; Federal State Autonomous Institution 'N. N. Burdenko National Medical Research Center of Neurosurgery' of the Ministry of Health of the Russian Federation, 125047 Moscow, Russia., Enikeev DV; Institute for Urology and Reproductive Health, Sechenov University, 119992 Moscow, Russia., Potoldykova NV; Institute for Urology and Reproductive Health, Sechenov University, 119992 Moscow, Russia., Archakov AI; Laboratory of Nanobiotechnology, Institute of Biomedical Chemistry, 119121 Moscow, Russia.
المصدر: Molecules (Basel, Switzerland) [Molecules] 2021 Jun 18; Vol. 26 (12). Date of Electronic Publication: 2021 Jun 18.
نوع المنشور: Journal Article
اللغة: English
بيانات الدورية: Publisher: MDPI Country of Publication: Switzerland NLM ID: 100964009 Publication Model: Electronic Cited Medium: Internet ISSN: 1420-3049 (Electronic) Linking ISSN: 14203049 NLM ISO Abbreviation: Molecules Subsets: MEDLINE
أسماء مطبوعة: Original Publication: Basel, Switzerland : MDPI, c1995-
مواضيع طبية MeSH: Glioma/*genetics , Nanowires/*chemistry , RNA, Circular/*chemistry , RNA, Circular/*genetics , Silicon/*chemistry, Aged ; Biosensing Techniques/methods ; Brain/drug effects ; Female ; Humans ; Male ; Middle Aged ; Oligonucleotide Array Sequence Analysis/methods ; Spectrum Analysis, Raman/methods
مستخلص: The application of micro-Raman spectroscopy was used for characterization of structural features of the high-k stack (h-k) layer of "silicon-on-insulator" (SOI) nanowire (NW) chip (h-k-SOI-NW chip), including Al 2 O 3 and HfO 2 in various combinations after heat treatment from 425 to 1000 °C. After that, the NW structures h-k-SOI-NW chip was created using gas plasma etching optical lithography. The stability of the signals from the monocrine phase of HfO 2 was shown. Significant differences were found in the elastic stresses of the silicon layers for very thick (>200 nm) Al 2 O 3 layers. In the UV spectra of SOI layers of a silicon substrate with HfO 2 , shoulders in the Raman spectrum were observed at 480-490 cm -1 of single-phonon scattering. The h-k-SOI-NW chip created in this way has been used for the detection of DNA-oligonucleotide sequences (oDNA), that became a synthetic analog of circular RNA-circ-SHKBP1 associated with the development of glioma at a concentration of 1.1 × 10 -16 M. The possibility of using such h-k-SOI NW chips for the detection of circ-SHKBP1 in blood plasma of patients diagnosed with neoplasm of uncertain nature of the brain and central nervous system was shown.
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معلومات مُعتمدة: 075-15-2020-913 Ministry of Science and Higher Education of the Russian Federation
فهرسة مساهمة: Keywords: SOI; circ-SHKBP1; circular RNA; high-k stack layer; micro-Raman spectroscopy; nanowire chip
المشرفين على المادة: 0 (RNA, Circular)
Z4152N8IUI (Silicon)
تواريخ الأحداث: Date Created: 20210702 Date Completed: 20210713 Latest Revision: 20210713
رمز التحديث: 20221213
مُعرف محوري في PubMed: PMC8234461
DOI: 10.3390/molecules26123715
PMID: 34207029
قاعدة البيانات: MEDLINE
الوصف
تدمد:1420-3049
DOI:10.3390/molecules26123715