دورية أكاديمية
Magnetic Sector Secondary Ion Mass Spectrometry on FIB-SEM Instruments for Nanoscale Chemical Imaging.
| العنوان: | Magnetic Sector Secondary Ion Mass Spectrometry on FIB-SEM Instruments for Nanoscale Chemical Imaging. |
|---|---|
| المؤلفون: | De Castro O; Advanced Instrumentation for Nano-Analytics, MRT Department, Luxembourg Institute of Science and Technology, 41 rue du Brill, L-4422 Belvaux, Luxembourg., Audinot JN; Advanced Instrumentation for Nano-Analytics, MRT Department, Luxembourg Institute of Science and Technology, 41 rue du Brill, L-4422 Belvaux, Luxembourg., Hoang HQ; Advanced Instrumentation for Nano-Analytics, MRT Department, Luxembourg Institute of Science and Technology, 41 rue du Brill, L-4422 Belvaux, Luxembourg., Coulbary C; Advanced Instrumentation for Nano-Analytics, MRT Department, Luxembourg Institute of Science and Technology, 41 rue du Brill, L-4422 Belvaux, Luxembourg., Bouton O; Prototyping, MRT Department, Luxembourg Institute of Science and Technology, 41 rue du Brill, L-4422 Belvaux, Luxembourg., Barrahma R; Prototyping, MRT Department, Luxembourg Institute of Science and Technology, 41 rue du Brill, L-4422 Belvaux, Luxembourg., Ost A; Advanced Instrumentation for Nano-Analytics, MRT Department, Luxembourg Institute of Science and Technology, 41 rue du Brill, L-4422 Belvaux, Luxembourg.; Faculty of Science, Technology and Medicine, University of Luxembourg, 2 Avenue de l'Université, L-4365 Esch-sur-Alzette, Luxembourg., Stoffels C; Advanced Instrumentation for Nano-Analytics, MRT Department, Luxembourg Institute of Science and Technology, 41 rue du Brill, L-4422 Belvaux, Luxembourg.; Faculty of Science, Technology and Medicine, University of Luxembourg, 2 Avenue de l'Université, L-4365 Esch-sur-Alzette, Luxembourg., Jiao C; Thermo Fisher Scientific; Achtseweg Noord 5, 5651 GG Eindhoven, Netherlands., Dutka M; Thermo Fisher Scientific; Achtseweg Noord 5, 5651 GG Eindhoven, Netherlands., Geryk M; Thermo Fisher Scientific; Vlastimila Pecha 12, 627 00 Brno, Czech Republic., Wirtz T; Advanced Instrumentation for Nano-Analytics, MRT Department, Luxembourg Institute of Science and Technology, 41 rue du Brill, L-4422 Belvaux, Luxembourg. |
| المصدر: | Analytical chemistry [Anal Chem] 2022 Aug 02; Vol. 94 (30), pp. 10754-10763. Date of Electronic Publication: 2022 Jul 21. |
| نوع المنشور: | Journal Article; Research Support, Non-U.S. Gov't |
| اللغة: | English |
| بيانات الدورية: | Publisher: American Chemical Society Country of Publication: United States NLM ID: 0370536 Publication Model: Print-Electronic Cited Medium: Internet ISSN: 1520-6882 (Electronic) Linking ISSN: 00032700 NLM ISO Abbreviation: Anal Chem Subsets: MEDLINE |
| أسماء مطبوعة: | Original Publication: Washington, American Chemical Society. |
| مواضيع طبية MeSH: | Imaging, Three-Dimensional*/methods , Spectrometry, Mass, Secondary Ion*, Magnetic Phenomena ; Microscopy, Electron, Scanning |
| مستخلص: | The structural, morphological, and chemical characterization of samples is of utmost importance for a large number of scientific fields. Furthermore, this characterization very often needs to be performed in three dimensions and at length scales down to the nanometer. Therefore, there is a stringent necessity to develop appropriate instrumentational solutions to fulfill these needs. Here we report on the deployment of magnetic sector secondary ion mass spectrometry (SIMS) on a type of instrument widely used for such nanoscale investigations, namely, focused ion beam (FIB)-scanning electron microscopy (SEM) instruments. First, we present the layout of the FIB-SEM-SIMS instrument and address its performance by using specific test samples. The achieved performance can be summarized as follows: an overall secondary ion beam transmission above 40%, a mass resolving power ( M /Δ M ) of more than 400, a detectable mass range from 1 to 400 amu, a lateral resolution in two-dimensional (2D) chemical imaging mode of 15 nm, and a depth resolution of ∼4 nm at 3.0 keV of beam landing energy. Second, we show results (depth profiling, 2D imaging, three-dimensional imaging) obtained in a wide range of areas, such as battery research, photovoltaics, multilayered samples, and life science applications. We hereby highlight the system's versatile capability of conducting high-performance correlative studies in the fields of materials science and life sciences. |
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| تواريخ الأحداث: | Date Created: 20220721 Date Completed: 20220803 Latest Revision: 20220810 |
| رمز التحديث: | 20221213 |
| مُعرف محوري في PubMed: | PMC9352148 |
| DOI: | 10.1021/acs.analchem.2c01410 |
| PMID: | 35862487 |
| قاعدة البيانات: | MEDLINE |
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