مؤتمر
Development of Amorphous Silicon based EUV hardmasks through Physical Vapor Deposition.
| العنوان: | Development of Amorphous Silicon based EUV hardmasks through Physical Vapor Deposition. |
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| المؤلفون: | De Silva, Anuja, Mignot, Yann, Meli, Luciana, DeVries, Scott, Yongan Xu, Seshadri, Indira, Felix, Nelson M., Wilson Zeng, Yong Cao, Khoi Phan, Huixiong Dai, Ngai, Christopher S., Stolfi, Michael, Diehl, Daniel L. |
| المصدر: | Proceedings of SPIE; 8/14/2017, Vol. 10450, p1-14, 14p |
| قاعدة البيانات: | Complementary Index |
| تدمد: | 0277786X |
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| DOI: | 10.1117/12.2280607 |