مؤتمر
Ultimate edge-placement control using combined etch and lithography system optimizations.
| العنوان: | Ultimate edge-placement control using combined etch and lithography system optimizations. |
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| المؤلفون: | Peterson, Brennan, Wise, Rich, van der Straten, Koen, Viatkina, Katja, Luca, Melisa, Mokhlespour, Salman, Kubis, Michael, Cattani, Giordano, Hellin, David, Sobieski, Daniel, Dixit, Girish, Shamma, Nader, Rutigliani, Vito, Jaenen, Patrick, Halder, Sandip, Leray, Philippe |
| المصدر: | Proceedings of SPIE; 1/14/2018, Vol. 10586, p1-8, 8p |
| قاعدة البيانات: | Complementary Index |
| تدمد: | 0277786X |
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| DOI: | 10.1117/12.2297401 |