مؤتمر
Relationship between Slurry Flow Pattern and Removal Characteristic based on a Novel Polishing Tool.
| العنوان: | Relationship between Slurry Flow Pattern and Removal Characteristic based on a Novel Polishing Tool. |
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| المؤلفون: | ZHONG Bo, CHEN Xian-hua, WEN Zhong-jiang |
| المصدر: | Proceedings of SPIE; 9/27/2018, Vol. 10842, p1-4, 4p |
| قاعدة البيانات: | Complementary Index |
| تدمد: | 0277786X |
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| DOI: | 10.1117/12.2504955 |