مؤتمر
Determination of mechanical material properties of piezoelectric ZnO films.
| العنوان: | Determination of mechanical material properties of piezoelectric ZnO films. |
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| المؤلفون: | Koller, Stefan, Ziebart, V., Paul, Oliver, Brand, Oliver, Baltes, Henry, Sarro, Pasqualina M., Vellekoop, Michael J. |
| المصدر: | Proceedings of SPIE; Nov1998, Issue 1, p102-109, 8p |
| قاعدة البيانات: | Complementary Index |
| تدمد: | 0277786X |
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| DOI: | 10.1117/12.320160 |