التفاصيل البيبلوغرافية
| العنوان: |
A New In Situ Microscopy Approach to Study the Degradation and Failure Mechanisms of Time-Dependent Dielectric Breakdown: Set-Up and Opportunities. |
| المؤلفون: |
Zschech, Ehrenfried, Liao, Zhongquan, Gall, Martin, Yeap, Kong Boon, Sander, Christoph, Aubel, Oliver, Mühle, Uwe, Gluch, Jürgen, Niese, Sven, Standke, Yvonne, Rosenkranz, Rüdiger, Löffler, Markus, Vogel, Norman, Beyer, Armand, Engelmann, Hans‐Jürgen, Guttmann, Peter, Schneider, Gerd |
| المصدر: |
Advanced Engineering Materials; May2014, Vol. 16 Issue 5, p486-493, 8p |
| مصطلحات موضوعية: |
DIELECTRIC breakdown, INTEGRATED circuits, SCANNING transmission electron microscopy, APERTURE antennas, SPECTROSCOPIC imaging |
| مستخلص: |
The time dependent dielectric breakdown (TDDB) in copper/ultra-low-k on-chip interconnect stacks of integrated circuits has become one of the most critical reliability concerns in recent years. In this paper, a novel experimental in situ microscopy approach using transmission X-ray microscopy (TXM) and scanning transmission electron microscopy (STEM) is proposed to study TDDB degradation and failure mechanisms. It combines electrical testing and imaging techniques. Low-dose bright field (BF) STEM inserting a small condenser aperture is chosen to reduce the beam damage of the dielectric material, while the electron spectroscopic imaging technique is used for the chemical analysis to detect the migration path of Cu atoms. This new experimental approach will contribute to an improved understanding of the TDDB effect. [ABSTRACT FROM AUTHOR] |
|
Copyright of Advanced Engineering Materials is the property of Wiley-Blackwell and its content may not be copied or emailed to multiple sites or posted to a listserv without the copyright holder's express written permission. However, users may print, download, or email articles for individual use. This abstract may be abridged. No warranty is given about the accuracy of the copy. Users should refer to the original published version of the material for the full abstract. (Copyright applies to all Abstracts.) |
| قاعدة البيانات: |
Complementary Index |
Full Text Finder