Manufacturing of freeform micro-optical elements by mask-less laser direct write lithography and replication by imprinting

التفاصيل البيبلوغرافية
العنوان: Manufacturing of freeform micro-optical elements by mask-less laser direct write lithography and replication by imprinting
المؤلفون: Krevor, David H., Beich, William S., Schaub, Michael P., Symmons, Alan, Kuna, L., Leiner, C., Ruttloff, S., Nemitz, W., Reil, F., Hartmann, P., Wenzl, F. P., Sommer, C.
المصدر: Proceedings of SPIE; October 2016, Vol. 9949 Issue: 1 p99490C-99490C-8, 895419p
قاعدة البيانات: Supplemental Index
الوصف
تدمد:0277786X
DOI:10.1117/12.2237776