دورية
Manufacturing of freeform micro-optical elements by mask-less laser direct write lithography and replication by imprinting
العنوان: | Manufacturing of freeform micro-optical elements by mask-less laser direct write lithography and replication by imprinting |
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المؤلفون: | Krevor, David H., Beich, William S., Schaub, Michael P., Symmons, Alan, Kuna, L., Leiner, C., Ruttloff, S., Nemitz, W., Reil, F., Hartmann, P., Wenzl, F. P., Sommer, C. |
المصدر: | Proceedings of SPIE; October 2016, Vol. 9949 Issue: 1 p99490C-99490C-8, 895419p |
قاعدة البيانات: | Supplemental Index |
تدمد: | 0277786X |
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DOI: | 10.1117/12.2237776 |