دورية
Wet Cleaning/Etching of NiAl Thin Film
العنوان: | Wet Cleaning/Etching of NiAl Thin Film |
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المؤلفون: | Le, Quoc Toan, Gül Arslan, Esen, Fundu, Kevin, Soulie, Jean Philippe, Altamirano-Sanchez, Efrain |
المصدر: | Diffusion and Defect Data Part B: Solid State Phenomena; August 2023, Vol. 346 Issue: 1 p341-345, 5p |
مستخلص: | The effect of various chemical solutions and mixtures on the etch characteristics, roughness change, and surface composition of NiAl, Al, and Ni films were investigated. Both HCl solution (1.82%) and NH |
قاعدة البيانات: | Supplemental Index |
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