دورية
Advanced pattern defect detection and analysis with artificial intelligence
| العنوان: | Advanced pattern defect detection and analysis with artificial intelligence |
|---|---|
| المؤلفون: | Sendelbach, Matthew J., Schuch, Nivea G., Yeo, Sangchul, Jang, Yongsun, Guk, Yeongju, Shin, Seungju, Jeong, Hee, Park, Kyungjae, Choi, Dawoon, Yang, Jaewon, Kim, Bongkeun, Koo, Kyoil, Jeong, Seongtae |
| المصدر: | Proceedings of SPIE; April 2024, Vol. 12955 Issue: 1 p129551E-129551E-7, 1165967p |
| قاعدة البيانات: | Supplemental Index |
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